Matches in SemOpenAlex for { <https://semopenalex.org/work/W1569191441> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W1569191441 abstract "The authors examined the dependence of outgassing characteristics at 157 nm exposure against the position of alicyclic compounds and fluorine in the resist base polymers of ArF and F/sub 2/ resists, using in-situ quadrupole mass spectrometry. The dependence of the total amount of outgassed species against the polymer structures are also investigated." @default.
- W1569191441 created "2016-06-24" @default.
- W1569191441 creator A5019210163 @default.
- W1569191441 creator A5030001987 @default.
- W1569191441 creator A5052295977 @default.
- W1569191441 creator A5066653314 @default.
- W1569191441 creator A5074819917 @default.
- W1569191441 creator A5086379728 @default.
- W1569191441 date "2003-08-27" @default.
- W1569191441 modified "2023-09-25" @default.
- W1569191441 title "Dependence of outgassing characters at 157 nm on resist structures" @default.
- W1569191441 cites W1964071082 @default.
- W1569191441 cites W1967547974 @default.
- W1569191441 cites W1978016474 @default.
- W1569191441 cites W2014377666 @default.
- W1569191441 cites W2021926273 @default.
- W1569191441 cites W2033457551 @default.
- W1569191441 cites W2073760755 @default.
- W1569191441 cites W2081272798 @default.
- W1569191441 cites W2084112494 @default.
- W1569191441 doi "https://doi.org/10.1109/imnc.2002.1178644" @default.
- W1569191441 hasPublicationYear "2003" @default.
- W1569191441 type Work @default.
- W1569191441 sameAs 1569191441 @default.
- W1569191441 citedByCount "0" @default.
- W1569191441 crossrefType "proceedings-article" @default.
- W1569191441 hasAuthorship W1569191441A5019210163 @default.
- W1569191441 hasAuthorship W1569191441A5030001987 @default.
- W1569191441 hasAuthorship W1569191441A5052295977 @default.
- W1569191441 hasAuthorship W1569191441A5066653314 @default.
- W1569191441 hasAuthorship W1569191441A5074819917 @default.
- W1569191441 hasAuthorship W1569191441A5086379728 @default.
- W1569191441 hasConcept C1012414 @default.
- W1569191441 hasConcept C103232671 @default.
- W1569191441 hasConcept C113196181 @default.
- W1569191441 hasConcept C134406635 @default.
- W1569191441 hasConcept C159985019 @default.
- W1569191441 hasConcept C162356407 @default.
- W1569191441 hasConcept C171250308 @default.
- W1569191441 hasConcept C178790620 @default.
- W1569191441 hasConcept C185592680 @default.
- W1569191441 hasConcept C188027245 @default.
- W1569191441 hasConcept C192562407 @default.
- W1569191441 hasConcept C206263279 @default.
- W1569191441 hasConcept C2779227376 @default.
- W1569191441 hasConcept C43617362 @default.
- W1569191441 hasConcept C521977710 @default.
- W1569191441 hasConcept C53524968 @default.
- W1569191441 hasConceptScore W1569191441C1012414 @default.
- W1569191441 hasConceptScore W1569191441C103232671 @default.
- W1569191441 hasConceptScore W1569191441C113196181 @default.
- W1569191441 hasConceptScore W1569191441C134406635 @default.
- W1569191441 hasConceptScore W1569191441C159985019 @default.
- W1569191441 hasConceptScore W1569191441C162356407 @default.
- W1569191441 hasConceptScore W1569191441C171250308 @default.
- W1569191441 hasConceptScore W1569191441C178790620 @default.
- W1569191441 hasConceptScore W1569191441C185592680 @default.
- W1569191441 hasConceptScore W1569191441C188027245 @default.
- W1569191441 hasConceptScore W1569191441C192562407 @default.
- W1569191441 hasConceptScore W1569191441C206263279 @default.
- W1569191441 hasConceptScore W1569191441C2779227376 @default.
- W1569191441 hasConceptScore W1569191441C43617362 @default.
- W1569191441 hasConceptScore W1569191441C521977710 @default.
- W1569191441 hasConceptScore W1569191441C53524968 @default.
- W1569191441 hasLocation W15691914411 @default.
- W1569191441 hasOpenAccess W1569191441 @default.
- W1569191441 hasPrimaryLocation W15691914411 @default.
- W1569191441 hasRelatedWork W1507216233 @default.
- W1569191441 hasRelatedWork W1964071082 @default.
- W1569191441 hasRelatedWork W1967547974 @default.
- W1569191441 hasRelatedWork W1971562907 @default.
- W1569191441 hasRelatedWork W1972965417 @default.
- W1569191441 hasRelatedWork W1993069017 @default.
- W1569191441 hasRelatedWork W1998679081 @default.
- W1569191441 hasRelatedWork W2001510380 @default.
- W1569191441 hasRelatedWork W2033455041 @default.
- W1569191441 hasRelatedWork W2037229087 @default.
- W1569191441 hasRelatedWork W2049375109 @default.
- W1569191441 hasRelatedWork W2050912158 @default.
- W1569191441 hasRelatedWork W2069517023 @default.
- W1569191441 hasRelatedWork W2070598240 @default.
- W1569191441 hasRelatedWork W2073399836 @default.
- W1569191441 hasRelatedWork W2079746400 @default.
- W1569191441 hasRelatedWork W2083637686 @default.
- W1569191441 hasRelatedWork W2130667790 @default.
- W1569191441 hasRelatedWork W2541854641 @default.
- W1569191441 hasRelatedWork W3145651840 @default.
- W1569191441 isParatext "false" @default.
- W1569191441 isRetracted "false" @default.
- W1569191441 magId "1569191441" @default.
- W1569191441 workType "article" @default.