Matches in SemOpenAlex for { <https://semopenalex.org/work/W1569216759> ?p ?o ?g. }
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- W1569216759 endingPage "66" @default.
- W1569216759 startingPage "65" @default.
- W1569216759 abstract "In VLSI technology, the devices are continuously scaled down for higher packing density and better performance. To take the full advantage of device scaling, a titanium salicide(1) process has been proposed recently. At the same time, in the submicron MOSFET's, the gate oxide thickness has been scaled down to around 15nm. Both the oxide breakdown and hot carrier effects become crucial issues to the device reliability. The oxide breakdown and hot carrier effects have been attributed to either oxide charge trapping(2, 3) or interface state generation(4). In this paper, we have observed that the titanium salicide process can reduce both electron and hole trapping in the oxide. and improve high field induced hot electron reliability, A hydrogen model has been proposed to explain these phenomena." @default.
- W1569216759 created "2016-06-24" @default.
- W1569216759 creator A5017096429 @default.
- W1569216759 creator A5047503721 @default.
- W1569216759 date "1987-05-22" @default.
- W1569216759 modified "2023-09-23" @default.
- W1569216759 title "Effects of Titanium Salicide Process on Oxide Charge Trapping and Hot-Electron Reliability in Submicron MOS Devices for VLSI" @default.
- W1569216759 hasPublicationYear "1987" @default.
- W1569216759 type Work @default.
- W1569216759 sameAs 1569216759 @default.
- W1569216759 citedByCount "2" @default.
- W1569216759 crossrefType "proceedings-article" @default.
- W1569216759 hasAuthorship W1569216759A5017096429 @default.
- W1569216759 hasAuthorship W1569216759A5047503721 @default.
- W1569216759 hasConcept C119599485 @default.
- W1569216759 hasConcept C121332964 @default.
- W1569216759 hasConcept C127413603 @default.
- W1569216759 hasConcept C14580979 @default.
- W1569216759 hasConcept C163258240 @default.
- W1569216759 hasConcept C165801399 @default.
- W1569216759 hasConcept C166524527 @default.
- W1569216759 hasConcept C172385210 @default.
- W1569216759 hasConcept C173118649 @default.
- W1569216759 hasConcept C18903297 @default.
- W1569216759 hasConcept C191897082 @default.
- W1569216759 hasConcept C192562407 @default.
- W1569216759 hasConcept C2361726 @default.
- W1569216759 hasConcept C24326235 @default.
- W1569216759 hasConcept C2777924906 @default.
- W1569216759 hasConcept C2778413303 @default.
- W1569216759 hasConcept C2779851234 @default.
- W1569216759 hasConcept C2780901251 @default.
- W1569216759 hasConcept C42360764 @default.
- W1569216759 hasConcept C43214815 @default.
- W1569216759 hasConcept C49040817 @default.
- W1569216759 hasConcept C506065880 @default.
- W1569216759 hasConcept C544956773 @default.
- W1569216759 hasConcept C62520636 @default.
- W1569216759 hasConcept C86803240 @default.
- W1569216759 hasConceptScore W1569216759C119599485 @default.
- W1569216759 hasConceptScore W1569216759C121332964 @default.
- W1569216759 hasConceptScore W1569216759C127413603 @default.
- W1569216759 hasConceptScore W1569216759C14580979 @default.
- W1569216759 hasConceptScore W1569216759C163258240 @default.
- W1569216759 hasConceptScore W1569216759C165801399 @default.
- W1569216759 hasConceptScore W1569216759C166524527 @default.
- W1569216759 hasConceptScore W1569216759C172385210 @default.
- W1569216759 hasConceptScore W1569216759C173118649 @default.
- W1569216759 hasConceptScore W1569216759C18903297 @default.
- W1569216759 hasConceptScore W1569216759C191897082 @default.
- W1569216759 hasConceptScore W1569216759C192562407 @default.
- W1569216759 hasConceptScore W1569216759C2361726 @default.
- W1569216759 hasConceptScore W1569216759C24326235 @default.
- W1569216759 hasConceptScore W1569216759C2777924906 @default.
- W1569216759 hasConceptScore W1569216759C2778413303 @default.
- W1569216759 hasConceptScore W1569216759C2779851234 @default.
- W1569216759 hasConceptScore W1569216759C2780901251 @default.
- W1569216759 hasConceptScore W1569216759C42360764 @default.
- W1569216759 hasConceptScore W1569216759C43214815 @default.
- W1569216759 hasConceptScore W1569216759C49040817 @default.
- W1569216759 hasConceptScore W1569216759C506065880 @default.
- W1569216759 hasConceptScore W1569216759C544956773 @default.
- W1569216759 hasConceptScore W1569216759C62520636 @default.
- W1569216759 hasConceptScore W1569216759C86803240 @default.
- W1569216759 hasLocation W15692167591 @default.
- W1569216759 hasOpenAccess W1569216759 @default.
- W1569216759 hasPrimaryLocation W15692167591 @default.
- W1569216759 hasRelatedWork W1573098014 @default.
- W1569216759 hasRelatedWork W1579781517 @default.
- W1569216759 hasRelatedWork W1603537436 @default.
- W1569216759 hasRelatedWork W1893724774 @default.
- W1569216759 hasRelatedWork W1969751072 @default.
- W1569216759 hasRelatedWork W2019487744 @default.
- W1569216759 hasRelatedWork W2037815319 @default.
- W1569216759 hasRelatedWork W2096310040 @default.
- W1569216759 hasRelatedWork W2102031326 @default.
- W1569216759 hasRelatedWork W2109772071 @default.
- W1569216759 hasRelatedWork W2114139546 @default.
- W1569216759 hasRelatedWork W2119945992 @default.
- W1569216759 hasRelatedWork W2124734126 @default.
- W1569216759 hasRelatedWork W2136195316 @default.
- W1569216759 hasRelatedWork W2545288211 @default.
- W1569216759 hasRelatedWork W2546766391 @default.
- W1569216759 hasRelatedWork W2607648628 @default.
- W1569216759 hasRelatedWork W3012578875 @default.
- W1569216759 hasRelatedWork W3147875479 @default.
- W1569216759 hasRelatedWork W635434182 @default.
- W1569216759 isParatext "false" @default.
- W1569216759 isRetracted "false" @default.
- W1569216759 magId "1569216759" @default.
- W1569216759 workType "article" @default.