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- W1569247960 abstract "Active oxidation of CVD-Si3N4 in ArO2 atmospheres was investigated at temperatures from 1823 to 1923 K. Active oxidation rates increased with increasing oxygen partial pressure, temperature and total gas flow rate. The rate-controlling step for active oxidation is oxygen diffusion through a gaseous boundary layer. The transition from active to passive oxidation was observed at a certain oxygen partial pressure. The transition behavior is discussed using Wagner's model." @default.
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- W1569247960 date "1992-07-01" @default.
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- W1569247960 title "High-temperature active oxidation of CVD-Si3N4 in Ar$z.sbnd;O2 atmosphere" @default.
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- W1569247960 doi "https://doi.org/10.1016/0167-2738(92)90389-7" @default.
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