FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1569321779> ?p ?o ?g. }

• W1569321779 endingPage "G197" @default.
• W1569321779 startingPage "G197" @default.
• W1569321779 abstract "It has been reported that the work function of nitrided molybdenum (MoN) can be modulated by the atomic ratio of and is suitable for gate material of complementary metal oxide semiconductor devices. In this work, we investigated the characteristics of prepared by reactively sputtering deposition from the gate electrode point of view. The main phase of the films is MoN(200). As the ratio increases, the microstructure of film tends to be amorphous-like and the resistivity increases. After high-temperature annealing, the phase remains stable and grain size increases slightly. The film has better immunity to sputtering damage than film; therefore, the sputtering deposition method could be a choice of metal gate deposition as -based dielectric is used. The work function of increases with the increase of nitrogen content and tends to saturate at the valence band of Si. No Fermi-pinning effect is observed on film. The work function and thermal stability of show good thermal stability on both and films up to at least. All of these results indicate that MoN is a good candidate of gate electrode for p-type metal oxide semiconductor field effect transistors (pMOSFETs) or fully depleted SOI devices." @default.
• W1569321779 created "2016-06-24" @default.
• W1569321779 creator A5045562497 @default.
• W1569321779 creator A5069031304 @default.
• W1569321779 creator A5070321675 @default.
• W1569321779 date "2006-01-01" @default.
• W1569321779 modified "2023-10-01" @default.
• W1569321779 title "Investigation of Molybdenum Nitride Gate on SiO[sub 2] and HfO[sub 2] for MOSFET Application" @default.
• W1569321779 cites W1973221791 @default.
• W1569321779 cites W2043695984 @default.
• W1569321779 cites W2061236010 @default.
• W1569321779 cites W2084196976 @default.
• W1569321779 cites W2102706597 @default.
• W1569321779 cites W2103638309 @default.
• W1569321779 cites W2111229858 @default.
• W1569321779 cites W2114373806 @default.
• W1569321779 cites W2121460280 @default.
• W1569321779 cites W2125707935 @default.
• W1569321779 cites W2142608138 @default.
• W1569321779 cites W2144802462 @default.
• W1569321779 cites W2148412756 @default.
• W1569321779 cites W2149806877 @default.
• W1569321779 cites W2150052292 @default.
• W1569321779 cites W2156420718 @default.
• W1569321779 cites W2158552116 @default.
• W1569321779 cites W4241383922 @default.
• W1569321779 cites W1987933286 @default.
• W1569321779 doi "https://doi.org/10.1149/1.2158576" @default.
• W1569321779 hasPublicationYear "2006" @default.
• W1569321779 type Work @default.
• W1569321779 sameAs 1569321779 @default.
• W1569321779 citedByCount "25" @default.
• W1569321779 countsByYear W15693217792012 @default.
• W1569321779 countsByYear W15693217792013 @default.
• W1569321779 countsByYear W15693217792014 @default.
• W1569321779 countsByYear W15693217792015 @default.
• W1569321779 countsByYear W15693217792016 @default.
• W1569321779 countsByYear W15693217792019 @default.
• W1569321779 countsByYear W15693217792021 @default.
• W1569321779 countsByYear W15693217792022 @default.
• W1569321779 countsByYear W15693217792023 @default.
• W1569321779 crossrefType "journal-article" @default.
• W1569321779 hasAuthorship W1569321779A5045562497 @default.
• W1569321779 hasAuthorship W1569321779A5069031304 @default.
• W1569321779 hasAuthorship W1569321779A5070321675 @default.
• W1569321779 hasConcept C115235246 @default.
• W1569321779 hasConcept C119599485 @default.
• W1569321779 hasConcept C127413603 @default.
• W1569321779 hasConcept C145598152 @default.
• W1569321779 hasConcept C165801399 @default.
• W1569321779 hasConcept C166972891 @default.
• W1569321779 hasConcept C171250308 @default.
• W1569321779 hasConcept C172385210 @default.
• W1569321779 hasConcept C178790620 @default.
• W1569321779 hasConcept C185592680 @default.
• W1569321779 hasConcept C19067145 @default.
• W1569321779 hasConcept C191897082 @default.
• W1569321779 hasConcept C192562407 @default.
• W1569321779 hasConcept C194760766 @default.
• W1569321779 hasConcept C22423302 @default.
• W1569321779 hasConcept C2361726 @default.
• W1569321779 hasConcept C2777855556 @default.
• W1569321779 hasConcept C2778413303 @default.
• W1569321779 hasConcept C2779227376 @default.
• W1569321779 hasConcept C49040817 @default.
• W1569321779 hasConcept C51140833 @default.
• W1569321779 hasConcept C544153396 @default.
• W1569321779 hasConcept C549387045 @default.
• W1569321779 hasConcept C56052488 @default.
• W1569321779 hasConceptScore W1569321779C115235246 @default.
• W1569321779 hasConceptScore W1569321779C119599485 @default.
• W1569321779 hasConceptScore W1569321779C127413603 @default.
• W1569321779 hasConceptScore W1569321779C145598152 @default.
• W1569321779 hasConceptScore W1569321779C165801399 @default.
• W1569321779 hasConceptScore W1569321779C166972891 @default.
• W1569321779 hasConceptScore W1569321779C171250308 @default.
• W1569321779 hasConceptScore W1569321779C172385210 @default.
• W1569321779 hasConceptScore W1569321779C178790620 @default.
• W1569321779 hasConceptScore W1569321779C185592680 @default.
• W1569321779 hasConceptScore W1569321779C19067145 @default.
• W1569321779 hasConceptScore W1569321779C191897082 @default.
• W1569321779 hasConceptScore W1569321779C192562407 @default.
• W1569321779 hasConceptScore W1569321779C194760766 @default.
• W1569321779 hasConceptScore W1569321779C22423302 @default.
• W1569321779 hasConceptScore W1569321779C2361726 @default.
• W1569321779 hasConceptScore W1569321779C2777855556 @default.
• W1569321779 hasConceptScore W1569321779C2778413303 @default.
• W1569321779 hasConceptScore W1569321779C2779227376 @default.
• W1569321779 hasConceptScore W1569321779C49040817 @default.
• W1569321779 hasConceptScore W1569321779C51140833 @default.
• W1569321779 hasConceptScore W1569321779C544153396 @default.
• W1569321779 hasConceptScore W1569321779C549387045 @default.
• W1569321779 hasConceptScore W1569321779C56052488 @default.
• W1569321779 hasIssue "3" @default.
• W1569321779 hasLocation W15693217791 @default.
• W1569321779 hasOpenAccess W1569321779 @default.
• W1569321779 hasPrimaryLocation W15693217791 @default.
• W1569321779 hasRelatedWork W1975737188 @default.

• next