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- W1569333809 abstract "Summary form only given, as follows. Using an emissive probe the distribution of plasma potential Vp in the bulk plasma of a DC Magnetron discharge has been determined for a range of pressures (0.26, 0.53 and 0.78 Pa) and cathode voltages (between -236 and -338 V). The results reveal a large axial variation in the space potential in the confined plasma, with & DeltaV/sub p/ /spl sim/25 V over a distance of 5 cm, from plasma to target. By combining the derived electric field with the modelled magnetic field, the distribution of single particles drifts have been found, namely the, electron E/spl times/B, GradB and curvature drift speeds. The predicted E/spl times/B drift speeds (with values up to /spl sim/1.5/spl times/10/sup 5/ ms/sup -1/) are typically 2 to 3 times higher than the GradB and curvature drifts. The Hall current channel is a broad region extending from above the 'race-track' down to a position close to the axis, 6 cm from the cathode. The calculated total Hall current is approximately 5 times the discharge current. Using a simple model of the discharge, in which a possible distribution of electron current throughout the plasma is considered, allows the determination of the ratio of the gyro-frequency to the collision frequency &omega/&nu locally in the bulk. Using this method, the maximum value of &omega/&nu is found to be /spl sim/25, which indicates that cross-field electron transport occurs more rapidly than from a classical prediction." @default.
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- W1569333809 date "2002-11-13" @default.
- W1569333809 modified "2023-09-27" @default.
- W1569333809 title "Measurement of the plasma potential in a magnetron discharge and the prediction of the electron drift speeds" @default.
- W1569333809 doi "https://doi.org/10.1109/ppps.2001.961093" @default.
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