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- W1569381443 abstract "We show a general concept to structure standard silicon wafers with an almost perfect three-dimensional shape, which is versatile, accurate and fast. For characterisation we grow photonic crystals with a complete photonic bandgap." @default.
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- W1569381443 date "2005-04-12" @default.
- W1569381443 modified "2023-09-26" @default.
- W1569381443 title "Three-dimensional silicon-based photonic crystals fabricated by electrochemical etching" @default.
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- W1569381443 doi "https://doi.org/10.1109/group4.2004.1416723" @default.
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