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- W1569484765 abstract "This chapter contains sections titled: Introduction The Freeman Ion Source The Bernas Ion Source Further Discussion of the Source Plasma Plasma and Sheath Potentials Effect of Sputtering on the Plasma Ion Heating of the Cathode and Anticathode in the Bernas Source Current Balance in the Freeman Source Current Balance in the Bernas Source Control Systems Freeman and Bernas Controls Bernas Indirectly Heated Cathode Lifetime and Maintenance Issues Use of BF3 Use of PH3, AsH3, P4, and As4 Use of Sb, Sb2O3, and SbF3 Use of SiF4 and GeF4 General Guidelines for the Use of Other Organic and Inorganic Compounds Electrode Cleaning and Maintenance Insulator Cleaning and Maintenance" @default.
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- W1569484765 date "2004-08-25" @default.
- W1569484765 modified "2023-10-16" @default.
- W1569484765 title "Freeman and Bernas Ion Sources" @default.
- W1569484765 doi "https://doi.org/10.1002/3527603956.ch8" @default.
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