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- W1569490667 abstract "In this paper, we firstly proposed a mechanically reliable parallel-plate type variable capacitor with a single crystalline silicon (SCS) supporting structure. The demonstrated variable capacitor was fabricated using an SiOG (silicon-on-glass) process, and both mechanical and electrical characteristics were measured. Total chip size was 1.05 mm/spl times/0.72 mm, and the pull-in voltage was measured to be 37 V. With and without the applied DC bias, the measured S/sub 11/ and S/sub 21/ were changed from -15.6 dB to -5.1 dB, and from -0.49 dB to -2.3 dB at 30 GHz, respectively. The measured capacitance at the up and the down state was 30 fF and 140 fF, respectively. Therefore, the capacitance ratio is calculated to be 4.67." @default.
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- W1569490667 date "2005-08-24" @default.
- W1569490667 modified "2023-09-27" @default.
- W1569490667 title "Mechanically reliable MEMS variable capacitor using single crystalline silicon (SCS) structure" @default.
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- W1569490667 doi "https://doi.org/10.1109/sensor.2005.1496643" @default.
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