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- W1569520647 abstract "To grow smooth and continuous polycrystalline Si (poly-Si) films by aluminum-induced crystallization (AIC), both of the Al and a-Si layer were deposited by dc magnetron sputtering. The size of the poly-Si islands and possibly the grain size of the poly-Si films could be increased with higher deposition rate of the Al layer and thicker aluminum oxide interface layer. As a result, it was possible to grow smooth and continuous poly-Si thin films of high crystalline quality by sputtering to deposit precursor layers." @default.
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- W1569520647 date "2003-05-18" @default.
- W1569520647 modified "2023-09-28" @default.
- W1569520647 title "Study of aluminum-induced crystallization process using sputtered Al layer" @default.
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