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- W1569644887 abstract "A detailed study is reported concerning oxidation of SiC nanoparticles obtained by plasma-enhanced chemical-vapour deposition (PECVD). The oxidation process has been analysed by thermogravimetry, infrared spectroscopy and elementary analysis. The oxidation behaviour of the as-grown powder can be understood in view of its polymeric structure containing a large amount of hydrogen that allows rapid diffusion of oxygen. Two steps have been identified: first, oxygen is incorporated as the bridging atom between two silicon atoms; and second, methyl groups are lost giving to a progressive restructuration of Si–O bonds to form silica. While the first step involves a mass gain, the second step results in a significant mass loss. After a heat treatment at 900°C of the as-grown sample, no hydrogen remains and the excess carbon precipitates, leading to a more dense packing of Si and C atoms that avoids diffusion of oxygen into the volume. In this case, oxidation is much slower because a protective layer of SiO2 is formed." @default.
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- W1569644887 date "2001-03-01" @default.
- W1569644887 modified "2023-10-16" @default.
- W1569644887 title "Thermal oxidation of polymer-like amorphous SixCyHwOz nanoparticles" @default.
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- W1569644887 doi "https://doi.org/10.1016/s0925-9635(00)00510-0" @default.
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