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- W1569652300 abstract "Water determination in semiconductor process gases is desirable in order to extend the life of gas delivery systems and improve wafer yields. The authors review their work in applying Fourier transform infrared spectroscopy to this problem, where a 10 ppb detection limit has been demonstrated for water in N{sub 2}, HCl, and HBr. The potential for optical determination of other contaminants in these gases is discussed. Also, alternative optical spectroscopic approaches are briefly described. Finally, they discuss methods for dealing with interference arising from water in the instrument beam path, yet outside the sample cell." @default.
- W1569652300 created "2016-06-24" @default.
- W1569652300 creator A5052934215 @default.
- W1569652300 creator A5067171173 @default.
- W1569652300 creator A5088208630 @default.
- W1569652300 date "1995-05-01" @default.
- W1569652300 modified "2023-10-14" @default.
- W1569652300 title "Trace water determination in gases by infrared spectroscopy" @default.
- W1569652300 cites W1669843735 @default.
- W1569652300 doi "https://doi.org/10.2172/74625" @default.
- W1569652300 hasPublicationYear "1995" @default.
- W1569652300 type Work @default.
- W1569652300 sameAs 1569652300 @default.
- W1569652300 citedByCount "0" @default.
- W1569652300 crossrefType "report" @default.
- W1569652300 hasAuthorship W1569652300A5052934215 @default.
- W1569652300 hasAuthorship W1569652300A5067171173 @default.
- W1569652300 hasAuthorship W1569652300A5088208630 @default.
- W1569652300 hasBestOaLocation W15696523003 @default.
- W1569652300 hasConcept C107872376 @default.
- W1569652300 hasConcept C108225325 @default.
- W1569652300 hasConcept C113196181 @default.
- W1569652300 hasConcept C119128265 @default.
- W1569652300 hasConcept C120665830 @default.
- W1569652300 hasConcept C121332964 @default.
- W1569652300 hasConcept C127162648 @default.
- W1569652300 hasConcept C130047971 @default.
- W1569652300 hasConcept C138885662 @default.
- W1569652300 hasConcept C153642686 @default.
- W1569652300 hasConcept C158355884 @default.
- W1569652300 hasConcept C160671074 @default.
- W1569652300 hasConcept C160892712 @default.
- W1569652300 hasConcept C178790620 @default.
- W1569652300 hasConcept C185592680 @default.
- W1569652300 hasConcept C192562407 @default.
- W1569652300 hasConcept C32022120 @default.
- W1569652300 hasConcept C32891209 @default.
- W1569652300 hasConcept C41008148 @default.
- W1569652300 hasConcept C41610221 @default.
- W1569652300 hasConcept C41895202 @default.
- W1569652300 hasConcept C43617362 @default.
- W1569652300 hasConcept C49040817 @default.
- W1569652300 hasConcept C62520636 @default.
- W1569652300 hasConcept C75291252 @default.
- W1569652300 hasConcept C76155785 @default.
- W1569652300 hasConceptScore W1569652300C107872376 @default.
- W1569652300 hasConceptScore W1569652300C108225325 @default.
- W1569652300 hasConceptScore W1569652300C113196181 @default.
- W1569652300 hasConceptScore W1569652300C119128265 @default.
- W1569652300 hasConceptScore W1569652300C120665830 @default.
- W1569652300 hasConceptScore W1569652300C121332964 @default.
- W1569652300 hasConceptScore W1569652300C127162648 @default.
- W1569652300 hasConceptScore W1569652300C130047971 @default.
- W1569652300 hasConceptScore W1569652300C138885662 @default.
- W1569652300 hasConceptScore W1569652300C153642686 @default.
- W1569652300 hasConceptScore W1569652300C158355884 @default.
- W1569652300 hasConceptScore W1569652300C160671074 @default.
- W1569652300 hasConceptScore W1569652300C160892712 @default.
- W1569652300 hasConceptScore W1569652300C178790620 @default.
- W1569652300 hasConceptScore W1569652300C185592680 @default.
- W1569652300 hasConceptScore W1569652300C192562407 @default.
- W1569652300 hasConceptScore W1569652300C32022120 @default.
- W1569652300 hasConceptScore W1569652300C32891209 @default.
- W1569652300 hasConceptScore W1569652300C41008148 @default.
- W1569652300 hasConceptScore W1569652300C41610221 @default.
- W1569652300 hasConceptScore W1569652300C41895202 @default.
- W1569652300 hasConceptScore W1569652300C43617362 @default.
- W1569652300 hasConceptScore W1569652300C49040817 @default.
- W1569652300 hasConceptScore W1569652300C62520636 @default.
- W1569652300 hasConceptScore W1569652300C75291252 @default.
- W1569652300 hasConceptScore W1569652300C76155785 @default.
- W1569652300 hasLocation W15696523001 @default.
- W1569652300 hasLocation W15696523002 @default.
- W1569652300 hasLocation W15696523003 @default.
- W1569652300 hasOpenAccess W1569652300 @default.
- W1569652300 hasPrimaryLocation W15696523001 @default.
- W1569652300 hasRelatedWork W1524091939 @default.
- W1569652300 hasRelatedWork W160534180 @default.
- W1569652300 hasRelatedWork W1974123218 @default.
- W1569652300 hasRelatedWork W2033351995 @default.
- W1569652300 hasRelatedWork W2035925482 @default.
- W1569652300 hasRelatedWork W2087204775 @default.
- W1569652300 hasRelatedWork W2802674989 @default.
- W1569652300 hasRelatedWork W2930067218 @default.
- W1569652300 hasRelatedWork W3205803401 @default.
- W1569652300 hasRelatedWork W4210615113 @default.
- W1569652300 isParatext "false" @default.
- W1569652300 isRetracted "false" @default.
- W1569652300 magId "1569652300" @default.
- W1569652300 workType "report" @default.