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• W1569732630 abstract "The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method." @default.
• W1569732630 created "2016-06-24" @default.
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• W1569732630 date "2010-07-17" @default.
• W1569732630 modified "2023-09-26" @default.
• W1569732630 title "High precision control of the piezo-actuated stage" @default.
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