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- W1569753115 abstract "Time dependent second harmonic optical signals were measured across silicon-on-insulator (SOI) wafer coupons contaminated by Cu-63 ion implanted into the buried oxide (BOX) and near the SOI/BOX and BOX/Bulk interfaces. Average signals after 1 second of exposure for all spatial points were compared between wafers and used to differentiate contamination levels post ion-implantation." @default.
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- W1569753115 date "2015-05-01" @default.
- W1569753115 modified "2023-09-23" @default.
- W1569753115 title "Rapid non-destructive detection of sub-surface Cu in silicon-on-insulator wafers by optical second harmonic generation" @default.
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- W1569753115 doi "https://doi.org/10.1109/asmc.2015.7164473" @default.
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