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• W1570278190 abstract "The fabrication of a micro-machined microwave switch using the standard 0.35/spl mu/m CMOS process and the post-process by wet etching without extra mask is implemented in this work. The components of the microwave switch are coplanar waveguide (CPW) transmission lines, a suspended membrane and supported springs. Experimental results show that the driving voltage of the switch approximates to 17 V. The switch has an insertion loss of -1.5 /spl sim/ -2.5dB and an isolation of -5 /spl sim/ -15 dB between 30 /spl sim/ 50 GHz. Moreover, an equivalent circuit is proposed to analyse the performance of this switch." @default.
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• W1570278190 date "2006-09-22" @default.
• W1570278190 modified "2023-09-26" @default.
• W1570278190 title "Implementation and analysis of microwave switch in CMOS-MEMS technology" @default.
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• W1570278190 doi "https://doi.org/10.1109/iscas.2006.1693077" @default.
• W1570278190 hasPublicationYear "2006" @default.
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