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- W1570279887 abstract "Processes for realizing ohmic drain/source contacts and a multilayer dielectric for sputtered amorphous oxide thin film transistors with high throughput at 160°C combined with a back-channel etch process have been demonstrated. These transistors achieve a carrier mobility of 8.6 cm2/Vs, a subthreshold slope of 0.18 V/dec, threshold voltage of 2.54 V and on/off ratio above 107. The chosen backchannel etch approach can also be extended to be used with drain/source metals such as molybdenum orcopper." @default.
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- W1570279887 date "2015-07-01" @default.
- W1570279887 modified "2023-09-26" @default.
- W1570279887 title "Low temperature processes for metal-oxide thin film transistors" @default.
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- W1570279887 doi "https://doi.org/10.1109/am-fpd.2015.7173191" @default.
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