FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1570285172> ?p ?o ?g. }

• W1570285172 endingPage "527" @default.
• W1570285172 startingPage "524" @default.
• W1570285172 abstract "We report the fabrication method of suspended bridge type nanoelectromechanical system (NEMS) resonator for high quality factor (Q-factor) and increase in resonance frequency beyond the ultra-high frequency (UHF) by laser interference lithography (LIL) using silicon-on-insulator wafer. LIL is capable of a fast nano-patterning over a large area and does not require a mask. In fabricating a suspended bridge type structure, parameter effects such as exposure dosage and the half angle between two incident beams at the intersection were explored. In this paper, successful fabrication of suspended bridge type NEMS resonator is presented using 257nm wavelength laser LIL." @default.
• W1570285172 created "2016-06-24" @default.
• W1570285172 creator A5005962936 @default.
• W1570285172 creator A5018670302 @default.
• W1570285172 creator A5020327287 @default.
• W1570285172 creator A5058558749 @default.
• W1570285172 creator A5062928741 @default.
• W1570285172 creator A5063776304 @default.
• W1570285172 creator A5090553391 @default.
• W1570285172 date "2012-10-01" @default.
• W1570285172 modified "2023-10-17" @default.
• W1570285172 title "Fabrication of suspended bridge type resonator using laser interference lithography" @default.
• W1570285172 cites W1934334701 @default.
• W1570285172 cites W2010543722 @default.
• W1570285172 cites W2032055322 @default.
• W1570285172 cites W2084070785 @default.
• W1570285172 cites W2084512325 @default.
• W1570285172 cites W2085572463 @default.
• W1570285172 cites W2103114895 @default.
• W1570285172 cites W2141734849 @default.
• W1570285172 cites W2988868196 @default.
• W1570285172 cites W3038050470 @default.
• W1570285172 hasPublicationYear "2012" @default.
• W1570285172 type Work @default.
• W1570285172 sameAs 1570285172 @default.
• W1570285172 citedByCount "0" @default.
• W1570285172 crossrefType "proceedings-article" @default.
• W1570285172 hasAuthorship W1570285172A5005962936 @default.
• W1570285172 hasAuthorship W1570285172A5018670302 @default.
• W1570285172 hasAuthorship W1570285172A5020327287 @default.
• W1570285172 hasAuthorship W1570285172A5058558749 @default.
• W1570285172 hasAuthorship W1570285172A5062928741 @default.
• W1570285172 hasAuthorship W1570285172A5063776304 @default.
• W1570285172 hasAuthorship W1570285172A5090553391 @default.
• W1570285172 hasConcept C105487726 @default.
• W1570285172 hasConcept C120665830 @default.
• W1570285172 hasConcept C121332964 @default.
• W1570285172 hasConcept C136525101 @default.
• W1570285172 hasConcept C137905882 @default.
• W1570285172 hasConcept C142724271 @default.
• W1570285172 hasConcept C15083742 @default.
• W1570285172 hasConcept C155672457 @default.
• W1570285172 hasConcept C159395582 @default.
• W1570285172 hasConcept C160671074 @default.
• W1570285172 hasConcept C171250308 @default.
• W1570285172 hasConcept C173409883 @default.
• W1570285172 hasConcept C187725362 @default.
• W1570285172 hasConcept C192562407 @default.
• W1570285172 hasConcept C200274948 @default.
• W1570285172 hasConcept C204223013 @default.
• W1570285172 hasConcept C204787440 @default.
• W1570285172 hasConcept C2779227376 @default.
• W1570285172 hasConcept C49040817 @default.
• W1570285172 hasConcept C520434653 @default.
• W1570285172 hasConcept C53143962 @default.
• W1570285172 hasConcept C53524968 @default.
• W1570285172 hasConcept C544956773 @default.
• W1570285172 hasConcept C71924100 @default.
• W1570285172 hasConcept C97126364 @default.
• W1570285172 hasConceptScore W1570285172C105487726 @default.
• W1570285172 hasConceptScore W1570285172C120665830 @default.
• W1570285172 hasConceptScore W1570285172C121332964 @default.
• W1570285172 hasConceptScore W1570285172C136525101 @default.
• W1570285172 hasConceptScore W1570285172C137905882 @default.
• W1570285172 hasConceptScore W1570285172C142724271 @default.
• W1570285172 hasConceptScore W1570285172C15083742 @default.
• W1570285172 hasConceptScore W1570285172C155672457 @default.
• W1570285172 hasConceptScore W1570285172C159395582 @default.
• W1570285172 hasConceptScore W1570285172C160671074 @default.
• W1570285172 hasConceptScore W1570285172C171250308 @default.
• W1570285172 hasConceptScore W1570285172C173409883 @default.
• W1570285172 hasConceptScore W1570285172C187725362 @default.
• W1570285172 hasConceptScore W1570285172C192562407 @default.
• W1570285172 hasConceptScore W1570285172C200274948 @default.
• W1570285172 hasConceptScore W1570285172C204223013 @default.
• W1570285172 hasConceptScore W1570285172C204787440 @default.
• W1570285172 hasConceptScore W1570285172C2779227376 @default.
• W1570285172 hasConceptScore W1570285172C49040817 @default.
• W1570285172 hasConceptScore W1570285172C520434653 @default.
• W1570285172 hasConceptScore W1570285172C53143962 @default.
• W1570285172 hasConceptScore W1570285172C53524968 @default.
• W1570285172 hasConceptScore W1570285172C544956773 @default.
• W1570285172 hasConceptScore W1570285172C71924100 @default.
• W1570285172 hasConceptScore W1570285172C97126364 @default.
• W1570285172 hasLocation W15702851721 @default.
• W1570285172 hasOpenAccess W1570285172 @default.
• W1570285172 hasPrimaryLocation W15702851721 @default.
• W1570285172 hasRelatedWork W1978247541 @default.
• W1570285172 hasRelatedWork W1983028248 @default.
• W1570285172 hasRelatedWork W1983251005 @default.
• W1570285172 hasRelatedWork W1996300422 @default.
• W1570285172 hasRelatedWork W2008346224 @default.
• W1570285172 hasRelatedWork W2054457994 @default.
• W1570285172 hasRelatedWork W2089834512 @default.
• W1570285172 hasRelatedWork W2093233978 @default.
• W1570285172 hasRelatedWork W2104709131 @default.
• W1570285172 hasRelatedWork W2106134475 @default.
• W1570285172 hasRelatedWork W2108724797 @default.

• next