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- W1570289162 abstract "In this paper, the self-consistent solution of l-D Poisson and Schrodinger equations is performed on doping profiles suitable for the fabrication of advanced ultra-short n-MOSFETs. Different issues are considered and investigated, including quantum-induced threshold voltage shifts, low-field electron effective mobility and gate-to-channel capacitance. The reported results give indications for the optimization of n-MOS channel doping profiles. In addition, the more advanced double-gate structure is analyzed and the reasons for possible advantages over more conventional single-gate ones (either SOI- or bulk-type) are investigated." @default.
- W1570289162 created "2016-06-24" @default.
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- W1570289162 date "2002-12-24" @default.
- W1570289162 modified "2023-09-24" @default.
- W1570289162 title "Optimization of channel profiles for ultra-short MOSFETs by quantum simulation" @default.
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- W1570289162 doi "https://doi.org/10.1109/iedm.1996.554104" @default.
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