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- W1570522423 abstract "Summary form only given, as follows. Ion-induced secondary electron energy profiles from a radio frequency biased (13.56 MHz) electrically insulating (Al/sub 2/O/sub 3/) electrode placed adjacent to an inductively coupled plasma (ICP) discharge are studied both experimentally and theoretically. Plasma feedstock gases include Ar, He, H/sub 2/, and N/sub 2/ over the pressure range of 2-20 m Torr. Radio frequency electrode bias voltages of 140, 285, and 425 V (peak to ground) are employed and the complete electron energy spectrum is measured 14 cm from the RF biased electrode using a differentially pumped retarding potential analyzer. The experimental measurements are compared to a collisionless Child-Langmuir RF sheath model, indicating that this technique is a useful in-situ diagnostic method to check the validity of RF sheath theories." @default.
- W1570522423 created "2016-06-24" @default.
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- W1570522423 date "2003-01-22" @default.
- W1570522423 modified "2023-09-27" @default.
- W1570522423 title "Secondary electron energy profiles as a diagnotic tool for RF plasma sheaths" @default.
- W1570522423 doi "https://doi.org/10.1109/plasma.1999.829437" @default.
- W1570522423 hasPublicationYear "2003" @default.
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