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- W1570592335 abstract "Ferrite thin-film RF integrated inductors using IC compatible processes are proposed firstly. Ferrites (Co-based, CoFe-based, MnZn-based, NiZn-based and garnet) for RF integrated inductors are investigated, and CoZrO shows the suitable high-frequency performance for RF applications. Various inductors with different kinds of ferrite thin-films have been fabricated using fully integrated processes. A typical inductor sample with CoZrO thin-film is presented. The L and Q values of the sample are 2.05 nH and 20.5 at 2 GHz, respectively. The inductance is raised by 17% and the quality factor is raised by 41%, compared with the inductor which does not include a ferrite thin-film. With the improvement of L and Q, the size of ferrite thin-film inductors can be reduced significantly." @default.
- W1570592335 created "2016-06-24" @default.
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- W1570592335 date "2005-08-24" @default.
- W1570592335 modified "2023-09-26" @default.
- W1570592335 title "Fully integrated ferrite-based inductors for RF ICs" @default.
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- W1570592335 doi "https://doi.org/10.1109/sensor.2005.1496562" @default.
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