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- W1570603409 abstract "In this paper, we present the growth techniques of carbon nanotubes and its application for nano-electromechanical devices. Several methods were attempted for the selective growth of the carbon nanotubes. Catalyzed metal (Ni) patterning and the following hot-filament chemical vapor deposition enable to grow carbon nanotubes on the metal pattern formed on quartz glass. However, no carbon nanotubes are grown on a flat silicon substrate using this method. It is found that the high electrostatic field with a negative substrate bias enhances the growth of the carbon nanotubes. This growth enhancement effect is applied to fabricate single carbon nanotube tip on silicon for scanning probe microscopy." @default.
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- W1570603409 date "2002-11-13" @default.
- W1570603409 modified "2023-09-26" @default.
- W1570603409 title "Selective growth of carbon nanotubes for nano electro mechanical device" @default.
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- W1570603409 doi "https://doi.org/10.1109/memsys.2001.906538" @default.
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