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• W1570630462 endingPage "438" @default.
• W1570630462 startingPage "431" @default.
• W1570630462 abstract "The use of Ar/H 2 atmospheric pressure plasma jets driven by a 13.56 MHz RF wave source with a Cu inner conductor was investigated for the deposition of highly conductive Cu thin films on polyimide substrates. It was found that the intensities of the Cu atom emission line were significantly increased by the addition of H 2 gas to the Ar plasmas. Secondary emission microscopy analysis indicated that the Cu films exhibited agglomerated structures with grains of several microns, which were larger than those produced using Ar plasma jets. It was found that the conductivity of Cu thin films prepared in nitrogen was 10 6 times higher than that of films produced using Ar/H 2 plasma jets with 10 sccm H 2 , and 4 times higher than that for films produced using identical Ar/H 2 plasma jets in air." @default.
• W1570630462 created "2016-06-24" @default.
• W1570630462 creator A5030300156 @default.
• W1570630462 creator A5050465730 @default.
• W1570630462 creator A5054894638 @default.
• W1570630462 creator A5059803513 @default.
• W1570630462 creator A5074565758 @default.
• W1570630462 date "2015-01-20" @default.
• W1570630462 modified "2023-10-06" @default.
• W1570630462 title "Highly Conductive Cu Thin Film Deposition on Polyimide by RF-Driven Atmospheric Pressure Plasma Jets under Nitrogen Atmosphere" @default.
• W1570630462 cites W1954586915 @default.
• W1570630462 cites W1967885063 @default.
• W1570630462 cites W1975620870 @default.
• W1570630462 cites W1979861750 @default.
• W1570630462 cites W1981268775 @default.
• W1570630462 cites W1989381172 @default.
• W1570630462 cites W2001717676 @default.
• W1570630462 cites W2007532955 @default.
• W1570630462 cites W2009551233 @default.
• W1570630462 cites W2019090875 @default.
• W1570630462 cites W2059600188 @default.
• W1570630462 cites W2062687401 @default.
• W1570630462 cites W2067298192 @default.
• W1570630462 cites W2067870902 @default.
• W1570630462 cites W2086563666 @default.
• W1570630462 cites W2109077896 @default.
• W1570630462 cites W2167945176 @default.
• W1570630462 doi "https://doi.org/10.1002/ppap.201400093" @default.
• W1570630462 hasPublicationYear "2015" @default.
• W1570630462 type Work @default.
• W1570630462 sameAs 1570630462 @default.
• W1570630462 citedByCount "11" @default.
• W1570630462 countsByYear W15706304622015 @default.
• W1570630462 countsByYear W15706304622016 @default.
• W1570630462 countsByYear W15706304622017 @default.
• W1570630462 countsByYear W15706304622018 @default.
• W1570630462 countsByYear W15706304622020 @default.
• W1570630462 countsByYear W15706304622022 @default.
• W1570630462 countsByYear W15706304622023 @default.
• W1570630462 crossrefType "journal-article" @default.
• W1570630462 hasAuthorship W1570630462A5030300156 @default.
• W1570630462 hasAuthorship W1570630462A5050465730 @default.
• W1570630462 hasAuthorship W1570630462A5054894638 @default.
• W1570630462 hasAuthorship W1570630462A5059803513 @default.
• W1570630462 hasAuthorship W1570630462A5074565758 @default.
• W1570630462 hasConcept C111368507 @default.
• W1570630462 hasConcept C113196181 @default.
• W1570630462 hasConcept C119599485 @default.
• W1570630462 hasConcept C121332964 @default.
• W1570630462 hasConcept C127313418 @default.
• W1570630462 hasConcept C127413603 @default.
• W1570630462 hasConcept C131540310 @default.
• W1570630462 hasConcept C147789679 @default.
• W1570630462 hasConcept C151730666 @default.
• W1570630462 hasConcept C159985019 @default.
• W1570630462 hasConcept C171250308 @default.
• W1570630462 hasConcept C178790620 @default.
• W1570630462 hasConcept C185592680 @default.
• W1570630462 hasConcept C19067145 @default.
• W1570630462 hasConcept C192562407 @default.
• W1570630462 hasConcept C200239111 @default.
• W1570630462 hasConcept C202374169 @default.
• W1570630462 hasConcept C2779227376 @default.
• W1570630462 hasConcept C2780965675 @default.
• W1570630462 hasConcept C2816523 @default.
• W1570630462 hasConcept C537208039 @default.
• W1570630462 hasConcept C62520636 @default.
• W1570630462 hasConcept C64297162 @default.
• W1570630462 hasConcept C65440619 @default.
• W1570630462 hasConcept C69990965 @default.
• W1570630462 hasConcept C82706917 @default.
• W1570630462 hasConcept C85344455 @default.
• W1570630462 hasConcept C86803240 @default.
• W1570630462 hasConcept C97355855 @default.
• W1570630462 hasConceptScore W1570630462C111368507 @default.
• W1570630462 hasConceptScore W1570630462C113196181 @default.
• W1570630462 hasConceptScore W1570630462C119599485 @default.
• W1570630462 hasConceptScore W1570630462C121332964 @default.
• W1570630462 hasConceptScore W1570630462C127313418 @default.
• W1570630462 hasConceptScore W1570630462C127413603 @default.
• W1570630462 hasConceptScore W1570630462C131540310 @default.
• W1570630462 hasConceptScore W1570630462C147789679 @default.
• W1570630462 hasConceptScore W1570630462C151730666 @default.
• W1570630462 hasConceptScore W1570630462C159985019 @default.
• W1570630462 hasConceptScore W1570630462C171250308 @default.
• W1570630462 hasConceptScore W1570630462C178790620 @default.
• W1570630462 hasConceptScore W1570630462C185592680 @default.
• W1570630462 hasConceptScore W1570630462C19067145 @default.
• W1570630462 hasConceptScore W1570630462C192562407 @default.
• W1570630462 hasConceptScore W1570630462C200239111 @default.
• W1570630462 hasConceptScore W1570630462C202374169 @default.
• W1570630462 hasConceptScore W1570630462C2779227376 @default.
• W1570630462 hasConceptScore W1570630462C2780965675 @default.
• W1570630462 hasConceptScore W1570630462C2816523 @default.
• W1570630462 hasConceptScore W1570630462C537208039 @default.
• W1570630462 hasConceptScore W1570630462C62520636 @default.
• W1570630462 hasConceptScore W1570630462C64297162 @default.
• W1570630462 hasConceptScore W1570630462C65440619 @default.

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