Matches in SemOpenAlex for { <https://semopenalex.org/work/W1570686319> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W1570686319 abstract "Various high quality epitaxial films, especially oxides, have been synthesized using off-axis sputtering deposition. In this presentation, we report the experiment results of ZnO films grown by the off-axis sputtering deposition. Films were synthesized in temperatures ranged from room temperature to 600 C, and pressures from 5 mTorr to 150 mTorr. Film growth rate was measured by surface profilometer, ellipsometer, and wavelength dispersive spectrometry. Due to the collisions between the sputtered species and the residue gases, the kinetic energy of species was reduced and the transport of depositing species changed from a ballistic movement for low pressure to a diffuse drift for high pressure in which the transport species were almost thermalized. The measurements show an increase of growth rates along the gravity vector when the Knodson (Knudsen??) number of transport species is less than 0.05, which suggests that gravity affected the transport characterization in off-axis sputtering deposition. Because the product of pressure (p) and travel distance (d) of sputtered species, p exceeds several mTorr-cm during film deposition, the classical simulations for sputtering process in high vacuum system may not be applied. Based on these experimental measurements, a transport process of the off-axis sputtering deposition is proposed. Several methods including the Monte Carlo method and gravity-driven flow dynamics simulation will be discussed." @default.
- W1570686319 created "2016-06-24" @default.
- W1570686319 creator A5013253365 @default.
- W1570686319 creator A5014515235 @default.
- W1570686319 creator A5024455099 @default.
- W1570686319 creator A5033578806 @default.
- W1570686319 date "2001-01-01" @default.
- W1570686319 modified "2023-09-26" @default.
- W1570686319 title "Transport Phenomena of Off-Axis Sputtering Deposition" @default.
- W1570686319 hasPublicationYear "2001" @default.
- W1570686319 type Work @default.
- W1570686319 sameAs 1570686319 @default.
- W1570686319 citedByCount "0" @default.
- W1570686319 crossrefType "journal-article" @default.
- W1570686319 hasAuthorship W1570686319A5013253365 @default.
- W1570686319 hasAuthorship W1570686319A5014515235 @default.
- W1570686319 hasAuthorship W1570686319A5024455099 @default.
- W1570686319 hasAuthorship W1570686319A5033578806 @default.
- W1570686319 hasConcept C113196181 @default.
- W1570686319 hasConcept C121332964 @default.
- W1570686319 hasConcept C127313418 @default.
- W1570686319 hasConcept C151730666 @default.
- W1570686319 hasConcept C171250308 @default.
- W1570686319 hasConcept C18293161 @default.
- W1570686319 hasConcept C185592680 @default.
- W1570686319 hasConcept C19067145 @default.
- W1570686319 hasConcept C192562407 @default.
- W1570686319 hasConcept C22423302 @default.
- W1570686319 hasConcept C2816523 @default.
- W1570686319 hasConcept C30646810 @default.
- W1570686319 hasConcept C43617362 @default.
- W1570686319 hasConcept C61427134 @default.
- W1570686319 hasConcept C64297162 @default.
- W1570686319 hasConcept C97355855 @default.
- W1570686319 hasConceptScore W1570686319C113196181 @default.
- W1570686319 hasConceptScore W1570686319C121332964 @default.
- W1570686319 hasConceptScore W1570686319C127313418 @default.
- W1570686319 hasConceptScore W1570686319C151730666 @default.
- W1570686319 hasConceptScore W1570686319C171250308 @default.
- W1570686319 hasConceptScore W1570686319C18293161 @default.
- W1570686319 hasConceptScore W1570686319C185592680 @default.
- W1570686319 hasConceptScore W1570686319C19067145 @default.
- W1570686319 hasConceptScore W1570686319C192562407 @default.
- W1570686319 hasConceptScore W1570686319C22423302 @default.
- W1570686319 hasConceptScore W1570686319C2816523 @default.
- W1570686319 hasConceptScore W1570686319C30646810 @default.
- W1570686319 hasConceptScore W1570686319C43617362 @default.
- W1570686319 hasConceptScore W1570686319C61427134 @default.
- W1570686319 hasConceptScore W1570686319C64297162 @default.
- W1570686319 hasConceptScore W1570686319C97355855 @default.
- W1570686319 hasLocation W15706863191 @default.
- W1570686319 hasOpenAccess W1570686319 @default.
- W1570686319 hasPrimaryLocation W15706863191 @default.
- W1570686319 hasRelatedWork W1975891941 @default.
- W1570686319 hasRelatedWork W1976105154 @default.
- W1570686319 hasRelatedWork W1985325655 @default.
- W1570686319 hasRelatedWork W1997199862 @default.
- W1570686319 hasRelatedWork W2014582979 @default.
- W1570686319 hasRelatedWork W2032665181 @default.
- W1570686319 hasRelatedWork W2034530950 @default.
- W1570686319 hasRelatedWork W2067423724 @default.
- W1570686319 hasRelatedWork W2077528868 @default.
- W1570686319 hasRelatedWork W2089891127 @default.
- W1570686319 hasRelatedWork W2094970744 @default.
- W1570686319 hasRelatedWork W2238986990 @default.
- W1570686319 hasRelatedWork W2312848659 @default.
- W1570686319 hasRelatedWork W2490451706 @default.
- W1570686319 hasRelatedWork W2792484915 @default.
- W1570686319 hasRelatedWork W2924673994 @default.
- W1570686319 hasRelatedWork W3094750404 @default.
- W1570686319 hasRelatedWork W3130364258 @default.
- W1570686319 hasRelatedWork W3174420709 @default.
- W1570686319 hasRelatedWork W96980556 @default.
- W1570686319 isParatext "false" @default.
- W1570686319 isRetracted "false" @default.
- W1570686319 magId "1570686319" @default.
- W1570686319 workType "article" @default.