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- W157070310 abstract "In the last twenty years or so there has been an enormous growth in the use of reactive gas glow discharges for the processing of surfaces. Surface processing in this context can be divided into three major categories: deposition, etching and surface modification. Deposition and etching are terms which are well understood by most technically trained people but surface modification is a less familiar expression. The term surface modification is used to describe those processes which alter the physical and/or chemical characteristics of a pre-existing solid surface and in which this alteration is limited to a region relatively near the surface of the solid. Examples of surface modification processes are plasma oxidation, plasma nitriding and surface texturing. Some areas of technology in which reactive gas glow discharges play a major role are microelectronics, magnetic and optical recording technologies, photovoltaics, architectural glass, and machine tool fabrication." @default.
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- W157070310 date "1991-01-01" @default.
- W157070310 modified "2023-09-27" @default.
- W157070310 title "Reactive Gas Glow Discharges" @default.
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- W157070310 doi "https://doi.org/10.1007/978-1-4684-5967-8_5" @default.
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