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- W1570985098 abstract "This chapter contains sections titled: Introduction High-resolution X-Ray Diffraction Techniques Evaluation of Crystalline Perfection and Characterization of Crystal Defects Accurate Determination of Crystallographic Orientation Measurement of Curvature or Bending of Single-crystal Wafers Characterization of Process-induced Defects in Semiconductors: Implantation-induced Damage Conclusions References" @default.
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- W1570985098 date "2003-09-23" @default.
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- W1570985098 title "High‐Resolution X‐Ray Diffraction Techniques for Structural Characterization of Silicon and Other Advanced Materials" @default.
- W1570985098 doi "https://doi.org/10.1002/0470871687.ch5" @default.
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