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• W1573850012 abstract "Semiconductor manufacturing spans across many manufacturing areas, including wafer manufacturing where electronic circuitry is built layered on a wafer, chip manufacturing that involves circuit probing and testing, and product manufacturing from which the final IC (integrated circuits) products are assembled, and finally tested. Semiconductor manufacturing is well known as the most challenging and complicated production systems that involve huge capital investment and advanced technologies. Fabrication of semiconductor products demands sophisticated control on quality, variability, yield, and reliability. It is crucial to automate all the semiconductor manufacturing processes to ensure the correctness and effectiveness of process sequences and the corresponding parameter settings, and to integrate all the fab (semiconductor factory) activities to provide the efficiency, reliability, and availability of semiconductor manufacturing. Automation and integration are the keys to success in modern semiconductor manufacturing. This chapter deals with the automation and integration problems in semiconductor manufacturing. Automation plays an increasingly important role in daily operations of semiconductor manufacturing. Like in the other industry, automation in semiconductor manufacturing originated from replacing human operators in tasks that are routine but tedious, or that should be done in dangerous, hazard environments. The ultimate goal of automation in semiconductor manufacturing is to eliminate the need of humans in fab operations. Depending on different degrees of operator attention and automatic control, fab operations are usually classified into three modes: Manual, Semi-Automated, and Fully Automated. Traditional manual mode of operations where fab tools (semiconductor equipment) are operated without computer assistance is very scarce to find in existing commercial fabs. Semi-automated operations are still quite popular in 6and 8-in fabs where processing tools are automated and controlled by computers, but fab operators are responsible for the movement of materials from and to the tools. Fully automated mode is now well established in 12-in (300-mm) fab operations where there are complete computer-controlled processing and handling. Automation in semiconductor fabs has saved billions of dollars by eliminating and reducing misprocessed products, and improved operational efficiency by reducing human times and costs spent in data entry and product movement. 3" @default.
• W1573850012 created "2016-06-24" @default.
• W1573850012 creator A5036148239 @default.
• W1573850012 date "2010-04-01" @default.
• W1573850012 modified "2023-09-24" @default.
• W1573850012 title "Automation and Integration in Semiconductor Manufacturing" @default.
• W1573850012 cites W1554504252 @default.
• W1573850012 cites W1575571691 @default.
• W1573850012 cites W1996109622 @default.
• W1573850012 cites W2019611725 @default.
• W1573850012 cites W2096110679 @default.
• W1573850012 cites W2100768442 @default.
• W1573850012 cites W2112002478 @default.
• W1573850012 cites W2125005172 @default.
• W1573850012 cites W2127022003 @default.
• W1573850012 doi "https://doi.org/10.5772/8569" @default.
• W1573850012 hasPublicationYear "2010" @default.
• W1573850012 type Work @default.
• W1573850012 sameAs 1573850012 @default.
• W1573850012 citedByCount "3" @default.
• W1573850012 countsByYear W15738500122014 @default.
• W1573850012 countsByYear W15738500122019 @default.
• W1573850012 countsByYear W15738500122020 @default.
• W1573850012 crossrefType "book-chapter" @default.
• W1573850012 hasAuthorship W1573850012A5036148239 @default.
• W1573850012 hasBestOaLocation W15738500121 @default.
• W1573850012 hasConcept C108225325 @default.
• W1573850012 hasConcept C115901376 @default.
• W1573850012 hasConcept C117671659 @default.
• W1573850012 hasConcept C119599485 @default.
• W1573850012 hasConcept C127413603 @default.
• W1573850012 hasConcept C160671074 @default.
• W1573850012 hasConcept C201995342 @default.
• W1573850012 hasConcept C41008148 @default.
• W1573850012 hasConcept C66018809 @default.
• W1573850012 hasConcept C78519656 @default.
• W1573850012 hasConceptScore W1573850012C108225325 @default.
• W1573850012 hasConceptScore W1573850012C115901376 @default.
• W1573850012 hasConceptScore W1573850012C117671659 @default.
• W1573850012 hasConceptScore W1573850012C119599485 @default.
• W1573850012 hasConceptScore W1573850012C127413603 @default.
• W1573850012 hasConceptScore W1573850012C160671074 @default.
• W1573850012 hasConceptScore W1573850012C201995342 @default.
• W1573850012 hasConceptScore W1573850012C41008148 @default.
• W1573850012 hasConceptScore W1573850012C66018809 @default.
• W1573850012 hasConceptScore W1573850012C78519656 @default.
• W1573850012 hasLocation W15738500121 @default.
• W1573850012 hasLocation W15738500122 @default.
• W1573850012 hasOpenAccess W1573850012 @default.
• W1573850012 hasPrimaryLocation W15738500121 @default.
• W1573850012 hasRelatedWork W1457512362 @default.
• W1573850012 hasRelatedWork W1505698635 @default.
• W1573850012 hasRelatedWork W1573850012 @default.
• W1573850012 hasRelatedWork W2140186278 @default.
• W1573850012 hasRelatedWork W2146421951 @default.
• W1573850012 hasRelatedWork W2147974620 @default.
• W1573850012 hasRelatedWork W2158486846 @default.
• W1573850012 hasRelatedWork W2168787312 @default.
• W1573850012 hasRelatedWork W2533937643 @default.
• W1573850012 hasRelatedWork W2616646566 @default.
• W1573850012 isParatext "false" @default.
• W1573850012 isRetracted "false" @default.
• W1573850012 magId "1573850012" @default.
• W1573850012 workType "book-chapter" @default.