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- W1574804850 abstract "We developed silicon micro-mirrors with two asymmetric axes for electrostatic field distribution measurements using a single external piezoelectric ceramic vibrating element. The 2D asymmetric silicon micro-mirrors were fabricated by using an SOI-MEMS process. The vibration transmissibility of the proposed mirror under a vacuum atmosphere was evaluated by dynamic analysis. We obtained the resonant frequency in the low-speed axis of 23.3 Hz and in the high-speed axis of 556.8 Hz respectively. To prevent a reduction in the amplitude width, we induced a 90° phase shift between the lowand high-speed axes at the resonance frequency. The ratio of the deformation between the low-speed axis of 30 Hz and the high-speed axis of 604 Hz was simulated to be 4.04. In measurement, the ratio of the deformation between the low-speed axis of 23.3 Hz and the high-speed axis of 556.8 Hz was 6.48. The difference between the calculated and experiment values were apparently due to the fabrication errors and frequency characteristics of piezoelectric ceramic vibrating element. A Lissajous pattern projected onto the screen. The scanning angle was a degree of 7.6 (total angle) in the lowand high-speed axis. We subsequently measured the electrostatic field distribution using the 2D asymmetric silicon micro-mirrors by means of the optical level method." @default.
- W1574804850 created "2016-06-24" @default.
- W1574804850 creator A5031469595 @default.
- W1574804850 creator A5057825061 @default.
- W1574804850 creator A5062936106 @default.
- W1574804850 creator A5072951355 @default.
- W1574804850 creator A5073609577 @default.
- W1574804850 date "2015-01-01" @default.
- W1574804850 modified "2023-09-27" @default.
- W1574804850 title "2D Asymmetric Silicon Micro-Mirrors for Electrostatic Field Distribution Measurement Using Optical Level Method" @default.
- W1574804850 cites W2070432432 @default.
- W1574804850 cites W2071779556 @default.
- W1574804850 cites W2083829350 @default.
- W1574804850 cites W2112872771 @default.
- W1574804850 cites W2135284882 @default.
- W1574804850 cites W2137178805 @default.
- W1574804850 cites W2148515676 @default.
- W1574804850 cites W2313298855 @default.
- W1574804850 doi "https://doi.org/10.1541/ieejsmas.135.311" @default.
- W1574804850 hasPublicationYear "2015" @default.
- W1574804850 type Work @default.
- W1574804850 sameAs 1574804850 @default.
- W1574804850 citedByCount "2" @default.
- W1574804850 countsByYear W15748048502016 @default.
- W1574804850 crossrefType "journal-article" @default.
- W1574804850 hasAuthorship W1574804850A5031469595 @default.
- W1574804850 hasAuthorship W1574804850A5057825061 @default.
- W1574804850 hasAuthorship W1574804850A5062936106 @default.
- W1574804850 hasAuthorship W1574804850A5072951355 @default.
- W1574804850 hasAuthorship W1574804850A5073609577 @default.
- W1574804850 hasConcept C100082104 @default.
- W1574804850 hasConcept C120665830 @default.
- W1574804850 hasConcept C121332964 @default.
- W1574804850 hasConcept C159985019 @default.
- W1574804850 hasConcept C192562407 @default.
- W1574804850 hasConcept C198394728 @default.
- W1574804850 hasConcept C24890656 @default.
- W1574804850 hasConcept C37977207 @default.
- W1574804850 hasConcept C49040817 @default.
- W1574804850 hasConcept C544956773 @default.
- W1574804850 hasConceptScore W1574804850C100082104 @default.
- W1574804850 hasConceptScore W1574804850C120665830 @default.
- W1574804850 hasConceptScore W1574804850C121332964 @default.
- W1574804850 hasConceptScore W1574804850C159985019 @default.
- W1574804850 hasConceptScore W1574804850C192562407 @default.
- W1574804850 hasConceptScore W1574804850C198394728 @default.
- W1574804850 hasConceptScore W1574804850C24890656 @default.
- W1574804850 hasConceptScore W1574804850C37977207 @default.
- W1574804850 hasConceptScore W1574804850C49040817 @default.
- W1574804850 hasConceptScore W1574804850C544956773 @default.
- W1574804850 hasLocation W15748048501 @default.
- W1574804850 hasOpenAccess W1574804850 @default.
- W1574804850 hasPrimaryLocation W15748048501 @default.
- W1574804850 hasRelatedWork W1522836123 @default.
- W1574804850 hasRelatedWork W1633052053 @default.
- W1574804850 hasRelatedWork W1887667083 @default.
- W1574804850 hasRelatedWork W2037840531 @default.
- W1574804850 hasRelatedWork W2043146957 @default.
- W1574804850 hasRelatedWork W2056694015 @default.
- W1574804850 hasRelatedWork W2081068942 @default.
- W1574804850 hasRelatedWork W2094115097 @default.
- W1574804850 hasRelatedWork W2145728184 @default.
- W1574804850 hasRelatedWork W2160853892 @default.
- W1574804850 hasRelatedWork W2168552217 @default.
- W1574804850 hasRelatedWork W2172003891 @default.
- W1574804850 hasRelatedWork W2348981559 @default.
- W1574804850 hasRelatedWork W2537191814 @default.
- W1574804850 hasRelatedWork W2538134487 @default.
- W1574804850 hasRelatedWork W2579088923 @default.
- W1574804850 hasRelatedWork W2610210579 @default.
- W1574804850 hasRelatedWork W2969859895 @default.
- W1574804850 hasRelatedWork W3015507044 @default.
- W1574804850 hasRelatedWork W3128361144 @default.
- W1574804850 isParatext "false" @default.
- W1574804850 isRetracted "false" @default.
- W1574804850 magId "1574804850" @default.
- W1574804850 workType "article" @default.