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- W157528521 abstract "In the electrochemical vapor deposition (EVD) process, gaseous cation precursors are passed over one side of a porous substrate, and oxygen is passed on the other side of the substrate. The gases diffuse and react within the porous substrate, and the pores get filled with the desired solid oxide. Subsequent solid state electrochemical transport through the solid oxide in the pores continues the reaction and the film grows over the porous substrate. In an ideal EVD process the deposition conditions are selected in such a way that the solid state electrochemical transport becomes the slowest step and it controls the deposition process. Therefore, the success in depositing an oxide by this process will depend on its solid state transport properties. In this paper, the overall equation that describes this solid state electrochemical transport has been derived and the way the various transport properties influence the deposit structure and growth is discussed. Using generalized equations, it has been shown that the EVD growth rate measurements can also be used to determine the defect structure and solid state transport properties of the rate controlling minority species in the oxide." @default.
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- W157528521 date "1991-08-01" @default.
- W157528521 modified "2023-09-23" @default.
- W157528521 title "Analysis of the solid state transport involved in the electrochemical vapor deposition of binary and ternary oxides" @default.
- W157528521 hasPublicationYear "1991" @default.
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