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- W1575348529 abstract "Conductivities of Si thin films crystallized in solid phase with/without YSZ layers by the two-step method with pulsed laser were investigated. The temperature dependences were also measured for both undoped and P-doped films using AC Hall effect measurement. It was found that the Si/YSZ/glass structure exhibited higher conductivities than those of the Si/glass. This suggested that the Si film crystallized on the YSZ layer is more suitable for application of electronic devices, compared with the Si film on glass." @default.
- W1575348529 created "2016-06-24" @default.
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- W1575348529 date "2015-07-01" @default.
- W1575348529 modified "2023-09-25" @default.
- W1575348529 title "Temperature dependences of conductivity in undoped and doped poly-Si thin films grown on YSZ crystallization-induction layers by two-step irradiation method with pulsed laser" @default.
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- W1575348529 doi "https://doi.org/10.1109/am-fpd.2015.7173249" @default.
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