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- W1576705212 abstract "The aim of this paper is to present first MEMS switch structures designed and manufactured in IMT. Switch structures with different length were designed, manufactured and measured. Comparisons between simulated and measured results are also presented." @default.
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- W1576705212 date "2005-03-31" @default.
- W1576705212 modified "2023-09-27" @default.
- W1576705212 title "MEMS switches: design and manufacturing" @default.
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- W1576705212 doi "https://doi.org/10.1109/smicnd.2004.1402831" @default.
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