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- W1578148963 abstract "Abstract The sections in this article are Device Characterization Device Fabrication Polarity Dependence Immunity from Plasma Damage Summary Acknowledgment" @default.
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- W1578148963 date "1999-12-27" @default.
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- W1578148963 title "Mis, Mim, and Msm Structures" @default.
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- W1578148963 doi "https://doi.org/10.1002/047134608x.w7026" @default.
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