FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1578312912> ?p ?o ?g. }

• W1578312912 abstract "Micro-springs are characterized and demonstrated in integrated circuit (IC) packaging and microelectromechanical system (MEMS) metrology applications. The springs are based on lithographically defined stress-engineered films and are compliant, electrically conducting and have micrometer scale dimensions. The force-displacement is experimentally measured and found to have constant stiffness through the majority of compression. Fretting experiments are performed to investigate the potential for intermittent electrical contact when the springs are used as a solder-less pressure contact for integrated circuit packaging. While operating at <1 mN of force, orders of magnitude lower than macroscopic connectors, no glitches slower than 4 nsec are observed for thousands of shake cycles. The springs are also demonstrated as scanning probes for non-destructive imaging of high-aspect ratio MEMS structures. Sidewall line-scans and tapping mode images in deep silicon trenches are presented using tip heights over ten times taller than commercial probes." @default.
• W1578312912 created "2016-06-24" @default.
• W1578312912 creator A5010238338 @default.
• W1578312912 creator A5013686287 @default.
• W1578312912 creator A5024125341 @default.
• W1578312912 creator A5070026002 @default.
• W1578312912 creator A5083621234 @default.
• W1578312912 creator A5087548565 @default.
• W1578312912 creator A5089447290 @default.
• W1578312912 date "2004-05-06" @default.
• W1578312912 modified "2023-09-26" @default.
• W1578312912 title "Micro-spring force characterization and applications in integrated circuit packaging and scanning probe MEMS metrology" @default.
• W1578312912 cites W1535415462 @default.
• W1578312912 cites W1599193696 @default.
• W1578312912 cites W1997837081 @default.
• W1578312912 cites W2005417545 @default.
• W1578312912 cites W2013718340 @default.
• W1578312912 cites W2015359162 @default.
• W1578312912 cites W2016023300 @default.
• W1578312912 cites W2026593831 @default.
• W1578312912 cites W2060050235 @default.
• W1578312912 cites W2080809960 @default.
• W1578312912 cites W2082887346 @default.
• W1578312912 cites W2099951695 @default.
• W1578312912 cites W2130267090 @default.
• W1578312912 cites W2165924972 @default.
• W1578312912 cites W2167176750 @default.
• W1578312912 cites W2479468204 @default.
• W1578312912 cites W3194800369 @default.
• W1578312912 cites W2172082724 @default.
• W1578312912 doi "https://doi.org/10.1109/sensor.2003.1215340" @default.
• W1578312912 hasPublicationYear "2004" @default.
• W1578312912 type Work @default.
• W1578312912 sameAs 1578312912 @default.
• W1578312912 citedByCount "5" @default.
• W1578312912 countsByYear W15783129122013 @default.
• W1578312912 crossrefType "proceedings-article" @default.
• W1578312912 hasAuthorship W1578312912A5010238338 @default.
• W1578312912 hasAuthorship W1578312912A5013686287 @default.
• W1578312912 hasAuthorship W1578312912A5024125341 @default.
• W1578312912 hasAuthorship W1578312912A5070026002 @default.
• W1578312912 hasAuthorship W1578312912A5083621234 @default.
• W1578312912 hasAuthorship W1578312912A5087548565 @default.
• W1578312912 hasAuthorship W1578312912A5089447290 @default.
• W1578312912 hasConcept C107551265 @default.
• W1578312912 hasConcept C120665830 @default.
• W1578312912 hasConcept C121332964 @default.
• W1578312912 hasConcept C127413603 @default.
• W1578312912 hasConcept C132235601 @default.
• W1578312912 hasConcept C15744967 @default.
• W1578312912 hasConcept C159985019 @default.
• W1578312912 hasConcept C171635847 @default.
• W1578312912 hasConcept C192562407 @default.
• W1578312912 hasConcept C195766429 @default.
• W1578312912 hasConcept C2778712887 @default.
• W1578312912 hasConcept C2779372316 @default.
• W1578312912 hasConcept C37977207 @default.
• W1578312912 hasConcept C49040817 @default.
• W1578312912 hasConcept C530198007 @default.
• W1578312912 hasConcept C542102704 @default.
• W1578312912 hasConcept C544956773 @default.
• W1578312912 hasConcept C62520636 @default.
• W1578312912 hasConcept C78519656 @default.
• W1578312912 hasConcept C81302111 @default.
• W1578312912 hasConcept C83082321 @default.
• W1578312912 hasConceptScore W1578312912C107551265 @default.
• W1578312912 hasConceptScore W1578312912C120665830 @default.
• W1578312912 hasConceptScore W1578312912C121332964 @default.
• W1578312912 hasConceptScore W1578312912C127413603 @default.
• W1578312912 hasConceptScore W1578312912C132235601 @default.
• W1578312912 hasConceptScore W1578312912C15744967 @default.
• W1578312912 hasConceptScore W1578312912C159985019 @default.
• W1578312912 hasConceptScore W1578312912C171635847 @default.
• W1578312912 hasConceptScore W1578312912C192562407 @default.
• W1578312912 hasConceptScore W1578312912C195766429 @default.
• W1578312912 hasConceptScore W1578312912C2778712887 @default.
• W1578312912 hasConceptScore W1578312912C2779372316 @default.
• W1578312912 hasConceptScore W1578312912C37977207 @default.
• W1578312912 hasConceptScore W1578312912C49040817 @default.
• W1578312912 hasConceptScore W1578312912C530198007 @default.
• W1578312912 hasConceptScore W1578312912C542102704 @default.
• W1578312912 hasConceptScore W1578312912C544956773 @default.
• W1578312912 hasConceptScore W1578312912C62520636 @default.
• W1578312912 hasConceptScore W1578312912C78519656 @default.
• W1578312912 hasConceptScore W1578312912C81302111 @default.
• W1578312912 hasConceptScore W1578312912C83082321 @default.
• W1578312912 hasLocation W15783129121 @default.
• W1578312912 hasOpenAccess W1578312912 @default.
• W1578312912 hasPrimaryLocation W15783129121 @default.
• W1578312912 hasRelatedWork W1887667083 @default.
• W1578312912 hasRelatedWork W1968552315 @default.
• W1578312912 hasRelatedWork W1968968791 @default.
• W1578312912 hasRelatedWork W1979163824 @default.
• W1578312912 hasRelatedWork W1979771712 @default.
• W1578312912 hasRelatedWork W1987524000 @default.
• W1578312912 hasRelatedWork W1998620010 @default.
• W1578312912 hasRelatedWork W2037840531 @default.
• W1578312912 hasRelatedWork W2048128586 @default.
• W1578312912 hasRelatedWork W2048380618 @default.
• W1578312912 hasRelatedWork W2058079018 @default.

• next