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- W1578889291 abstract "This paper reports, for the first time, a single-chip ovenization of a fully-encapsulated MEMS gyroscope to improve the stability of the scale factor and bias. We use the frequency output of the gyroscope as a thermometer, and, in turn heat the device through an on-chip silicon heater defined in the encapsulation layer. During temperature-controlled operation, the scale factor holds constant and the bias remains less than 1°/s, even as external temperature changed from 0-80°C." @default.
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- W1578889291 date "2015-06-01" @default.
- W1578889291 modified "2023-10-02" @default.
- W1578889291 title "On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)" @default.
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- W1578889291 doi "https://doi.org/10.1109/transducers.2015.7180855" @default.
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