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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1578978979> ?p ?o ?g. }

• W1578978979 abstract "(Ba,Sr)TiO/sub 3/ (BST) thin film capacitors using iridium (Ir) as an electrode material are investigated for high density (1 Gbit-scale and beyond) dynamic random access memories (DRAMs). Excellent electrical characteristics (e.g. high polarization and low leakage) of BST capacitors with Ir top electrodes were obtained. The excellent resistance of these capacitors to hydrogen damage during forming gas anneals is also reported." @default.
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• W1578978979 date "2002-12-24" @default.
• W1578978979 modified "2023-09-27" @default.
• W1578978979 title "Ir-electroded BST thin film capacitors for 1 giga-bit DRAM application" @default.
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• W1578978979 doi "https://doi.org/10.1109/iedm.1996.554072" @default.
• W1578978979 hasPublicationYear "2002" @default.
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