FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1579022747> ?p ?o ?g. }

• W1579022747 abstract "Through silicon via (TSV) is one of the key technologies in 2.5D and 3D electronic package. When the different materials and processes are used in TSV structure, the warpage, via depth variation and silicon TTV are challenges on backside via reveal process. In this paper, we use backside via flatness reveal process (named as BFR). The process steps include: carrier bond, wafer grinding to via surface exposed, silicon and via surface polishing by CMP, wet etching to reveal Cu nails, etching post-cleaning, passivation deposition with PECVD, and 2nd via reveal by CMP. We discuss the challenges and optimization ways in this paper, including: (1) eliminate de-lamination issue in adhesion layer by added protection layer, (2) to optimize wafer thinning and CMP polishing to reduce the saw marks that enhance by etching process, (3) silicon wet etching by hydroxide base chemical that silicon surface is smoothness, via footing and etching rate could be control by different temperature and chemical proportion, and (4) after the post cleaning, there is no silica residual and copper contamination around via. The BFR process can work on high warpage or large TTV product without worried about via depth variation." @default.
• W1579022747 created "2016-06-24" @default.
• W1579022747 creator A5008786162 @default.
• W1579022747 creator A5011585475 @default.
• W1579022747 creator A5020203263 @default.
• W1579022747 creator A5021349779 @default.
• W1579022747 creator A5040360143 @default.
• W1579022747 creator A5043595660 @default.
• W1579022747 creator A5050436140 @default.
• W1579022747 creator A5053027011 @default.
• W1579022747 creator A5062542287 @default.
• W1579022747 creator A5091574697 @default.
• W1579022747 date "2015-05-01" @default.
• W1579022747 modified "2023-09-24" @default.
• W1579022747 title "Optimization and challenges of backside via flatness reveal process" @default.
• W1579022747 cites W2002758544 @default.
• W1579022747 cites W2021456425 @default.
• W1579022747 cites W2110444864 @default.
• W1579022747 cites W2154281786 @default.
• W1579022747 cites W585119230 @default.
• W1579022747 doi "https://doi.org/10.1109/ectc.2015.7159846" @default.
• W1579022747 hasPublicationYear "2015" @default.
• W1579022747 type Work @default.
• W1579022747 sameAs 1579022747 @default.
• W1579022747 citedByCount "4" @default.
• W1579022747 countsByYear W15790227472015 @default.
• W1579022747 countsByYear W15790227472016 @default.
• W1579022747 countsByYear W15790227472019 @default.
• W1579022747 crossrefType "proceedings-article" @default.
• W1579022747 hasAuthorship W1579022747A5008786162 @default.
• W1579022747 hasAuthorship W1579022747A5011585475 @default.
• W1579022747 hasAuthorship W1579022747A5020203263 @default.
• W1579022747 hasAuthorship W1579022747A5021349779 @default.
• W1579022747 hasAuthorship W1579022747A5040360143 @default.
• W1579022747 hasAuthorship W1579022747A5043595660 @default.
• W1579022747 hasAuthorship W1579022747A5050436140 @default.
• W1579022747 hasAuthorship W1579022747A5053027011 @default.
• W1579022747 hasAuthorship W1579022747A5062542287 @default.
• W1579022747 hasAuthorship W1579022747A5091574697 @default.
• W1579022747 hasConcept C100460472 @default.
• W1579022747 hasConcept C115952470 @default.
• W1579022747 hasConcept C121332964 @default.
• W1579022747 hasConcept C127413603 @default.
• W1579022747 hasConcept C138113353 @default.
• W1579022747 hasConcept C159985019 @default.
• W1579022747 hasConcept C160671074 @default.
• W1579022747 hasConcept C171250308 @default.
• W1579022747 hasConcept C180088628 @default.
• W1579022747 hasConcept C192562407 @default.
• W1579022747 hasConcept C26405456 @default.
• W1579022747 hasConcept C2778530986 @default.
• W1579022747 hasConcept C2779227376 @default.
• W1579022747 hasConcept C33574316 @default.
• W1579022747 hasConcept C42360764 @default.
• W1579022747 hasConcept C45632049 @default.
• W1579022747 hasConcept C49040817 @default.
• W1579022747 hasConcept C544956773 @default.
• W1579022747 hasConcept C62520636 @default.
• W1579022747 hasConceptScore W1579022747C100460472 @default.
• W1579022747 hasConceptScore W1579022747C115952470 @default.
• W1579022747 hasConceptScore W1579022747C121332964 @default.
• W1579022747 hasConceptScore W1579022747C127413603 @default.
• W1579022747 hasConceptScore W1579022747C138113353 @default.
• W1579022747 hasConceptScore W1579022747C159985019 @default.
• W1579022747 hasConceptScore W1579022747C160671074 @default.
• W1579022747 hasConceptScore W1579022747C171250308 @default.
• W1579022747 hasConceptScore W1579022747C180088628 @default.
• W1579022747 hasConceptScore W1579022747C192562407 @default.
• W1579022747 hasConceptScore W1579022747C26405456 @default.
• W1579022747 hasConceptScore W1579022747C2778530986 @default.
• W1579022747 hasConceptScore W1579022747C2779227376 @default.
• W1579022747 hasConceptScore W1579022747C33574316 @default.
• W1579022747 hasConceptScore W1579022747C42360764 @default.
• W1579022747 hasConceptScore W1579022747C45632049 @default.
• W1579022747 hasConceptScore W1579022747C49040817 @default.
• W1579022747 hasConceptScore W1579022747C544956773 @default.
• W1579022747 hasConceptScore W1579022747C62520636 @default.
• W1579022747 hasLocation W15790227471 @default.
• W1579022747 hasOpenAccess W1579022747 @default.
• W1579022747 hasPrimaryLocation W15790227471 @default.
• W1579022747 hasRelatedWork W1982467832 @default.
• W1579022747 hasRelatedWork W1983045851 @default.
• W1579022747 hasRelatedWork W1987815369 @default.
• W1579022747 hasRelatedWork W1994629640 @default.
• W1579022747 hasRelatedWork W2021146739 @default.
• W1579022747 hasRelatedWork W2021456425 @default.
• W1579022747 hasRelatedWork W2060303597 @default.
• W1579022747 hasRelatedWork W2065946205 @default.
• W1579022747 hasRelatedWork W2154486823 @default.
• W1579022747 hasRelatedWork W2384356980 @default.
• W1579022747 hasRelatedWork W2528785063 @default.
• W1579022747 hasRelatedWork W2539256223 @default.
• W1579022747 hasRelatedWork W2970120272 @default.
• W1579022747 hasRelatedWork W1969011545 @default.
• W1579022747 hasRelatedWork W2768582324 @default.
• W1579022747 hasRelatedWork W2923417708 @default.
• W1579022747 hasRelatedWork W2933396622 @default.
• W1579022747 hasRelatedWork W2958567867 @default.
• W1579022747 hasRelatedWork W3020239119 @default.
• W1579022747 hasRelatedWork W3139755131 @default.

• next