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- W1579164957 abstract "This paper reports an electrostatically actuated single crystal 4H-SiC cantilever performing frequency mixing. In order to achieve electrostatic actuation, and solve the challenge of releasing MEMS structures due to the extreme chemical hardness of 4H-SiC, an n-p-n homoepitaxial structure was chosen, with cantilever actuators released by photoelectrochemical (PEC) etching. The middle p-SiC layer acts as a sacrificial layer in PEC etching to release actuators, and also isolates the top n-SiC cantilever from the bottom n-SiC substrate to realize electrostatic actuation. This study shows that electrostatically actuated RF MEMS capable of operating in harsh environments are attainable by single crystal 4H-SiC owing to its superior material properties including chemical and thermal stability, high ratio of Young's Modulus to density, etc." @default.
- W1579164957 created "2016-06-24" @default.
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- W1579164957 date "2015-06-01" @default.
- W1579164957 modified "2023-10-16" @default.
- W1579164957 title "4H-sic electrostatic cantilever actuator released by photoelectrochemical etching and application for frequency mixing" @default.
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- W1579164957 doi "https://doi.org/10.1109/transducers.2015.7181349" @default.
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