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- W1579583319 abstract "Although numerous single micromirror designs have been demonstrated in the literature, some applications require a mirror array with the individual mirrors integrated into a single frame. This approach helps provide uniform device performance by keeping the mirror-electrode alignment and gap height constant across the array. It also provides a high optical fill-factor, which is necessary when a high power laser is distributed over an array to reduce the power incident on each mirror. Here, just such a novel, foundry fabricated, solder self-assembled micromirror array is presented." @default.
- W1579583319 created "2016-06-24" @default.
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- W1579583319 date "2003-10-08" @default.
- W1579583319 modified "2023-09-26" @default.
- W1579583319 title "A solder self-assembled torsional micromirror array" @default.
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- W1579583319 doi "https://doi.org/10.1109/memsys.2003.1189724" @default.
- W1579583319 hasPublicationYear "2003" @default.
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