Matches in SemOpenAlex for { <https://semopenalex.org/work/W1579897411> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1579897411 abstract "In silane plasma, neutral radicals SiH/sub m/ (m=0-3) contribute to the amorphous silicon thin film formation. The authors have determined the reaction rate constant of SiH with SiH/sub 4/ in SiH/sub 4//Ar plasma using an infrared laser absorption method (IRLA). The experimental procedure is briefly described. At 400 K the constant was (3.2+or-0.9)* 10/sup -12/ cm/sup 3/-s/sup -1/. >" @default.
- W1579897411 created "2016-06-24" @default.
- W1579897411 creator A5008924973 @default.
- W1579897411 creator A5043307817 @default.
- W1579897411 creator A5043457676 @default.
- W1579897411 creator A5076754849 @default.
- W1579897411 creator A5089185222 @default.
- W1579897411 date "2003-01-13" @default.
- W1579897411 modified "2023-09-24" @default.
- W1579897411 title "Measurement of the reaction rate constant of the SiH radical in silane plasma using an infrared diode laser absorption method" @default.
- W1579897411 cites W1995116358 @default.
- W1579897411 cites W2067913055 @default.
- W1579897411 doi "https://doi.org/10.1109/plasma.1989.166246" @default.
- W1579897411 hasPublicationYear "2003" @default.
- W1579897411 type Work @default.
- W1579897411 sameAs 1579897411 @default.
- W1579897411 citedByCount "0" @default.
- W1579897411 crossrefType "proceedings-article" @default.
- W1579897411 hasAuthorship W1579897411A5008924973 @default.
- W1579897411 hasAuthorship W1579897411A5043307817 @default.
- W1579897411 hasAuthorship W1579897411A5043457676 @default.
- W1579897411 hasAuthorship W1579897411A5076754849 @default.
- W1579897411 hasAuthorship W1579897411A5089185222 @default.
- W1579897411 hasConcept C113196181 @default.
- W1579897411 hasConcept C120665830 @default.
- W1579897411 hasConcept C121332964 @default.
- W1579897411 hasConcept C125287762 @default.
- W1579897411 hasConcept C139066938 @default.
- W1579897411 hasConcept C148898269 @default.
- W1579897411 hasConcept C153642686 @default.
- W1579897411 hasConcept C158355884 @default.
- W1579897411 hasConcept C159985019 @default.
- W1579897411 hasConcept C178790620 @default.
- W1579897411 hasConcept C185592680 @default.
- W1579897411 hasConcept C192562407 @default.
- W1579897411 hasConcept C2776390347 @default.
- W1579897411 hasConcept C2778024649 @default.
- W1579897411 hasConcept C2778183973 @default.
- W1579897411 hasConcept C2779667780 @default.
- W1579897411 hasConcept C49040817 @default.
- W1579897411 hasConcept C520434653 @default.
- W1579897411 hasConcept C544956773 @default.
- W1579897411 hasConcept C56052488 @default.
- W1579897411 hasConcept C62520636 @default.
- W1579897411 hasConcept C78434282 @default.
- W1579897411 hasConcept C82706917 @default.
- W1579897411 hasConcept C93391505 @default.
- W1579897411 hasConceptScore W1579897411C113196181 @default.
- W1579897411 hasConceptScore W1579897411C120665830 @default.
- W1579897411 hasConceptScore W1579897411C121332964 @default.
- W1579897411 hasConceptScore W1579897411C125287762 @default.
- W1579897411 hasConceptScore W1579897411C139066938 @default.
- W1579897411 hasConceptScore W1579897411C148898269 @default.
- W1579897411 hasConceptScore W1579897411C153642686 @default.
- W1579897411 hasConceptScore W1579897411C158355884 @default.
- W1579897411 hasConceptScore W1579897411C159985019 @default.
- W1579897411 hasConceptScore W1579897411C178790620 @default.
- W1579897411 hasConceptScore W1579897411C185592680 @default.
- W1579897411 hasConceptScore W1579897411C192562407 @default.
- W1579897411 hasConceptScore W1579897411C2776390347 @default.
- W1579897411 hasConceptScore W1579897411C2778024649 @default.
- W1579897411 hasConceptScore W1579897411C2778183973 @default.
- W1579897411 hasConceptScore W1579897411C2779667780 @default.
- W1579897411 hasConceptScore W1579897411C49040817 @default.
- W1579897411 hasConceptScore W1579897411C520434653 @default.
- W1579897411 hasConceptScore W1579897411C544956773 @default.
- W1579897411 hasConceptScore W1579897411C56052488 @default.
- W1579897411 hasConceptScore W1579897411C62520636 @default.
- W1579897411 hasConceptScore W1579897411C78434282 @default.
- W1579897411 hasConceptScore W1579897411C82706917 @default.
- W1579897411 hasConceptScore W1579897411C93391505 @default.
- W1579897411 hasLocation W15798974111 @default.
- W1579897411 hasOpenAccess W1579897411 @default.
- W1579897411 hasPrimaryLocation W15798974111 @default.
- W1579897411 hasRelatedWork W1697061109 @default.
- W1579897411 hasRelatedWork W1977012885 @default.
- W1579897411 hasRelatedWork W1992111587 @default.
- W1579897411 hasRelatedWork W1995856997 @default.
- W1579897411 hasRelatedWork W2013161404 @default.
- W1579897411 hasRelatedWork W2014152561 @default.
- W1579897411 hasRelatedWork W2029596250 @default.
- W1579897411 hasRelatedWork W2058902950 @default.
- W1579897411 hasRelatedWork W2075713917 @default.
- W1579897411 hasRelatedWork W2097483460 @default.
- W1579897411 hasRelatedWork W2099654744 @default.
- W1579897411 hasRelatedWork W2158482642 @default.
- W1579897411 hasRelatedWork W2318551697 @default.
- W1579897411 hasRelatedWork W2764939321 @default.
- W1579897411 hasRelatedWork W2982350081 @default.
- W1579897411 hasRelatedWork W3130510617 @default.
- W1579897411 hasRelatedWork W356264964 @default.
- W1579897411 hasRelatedWork W634947734 @default.
- W1579897411 hasRelatedWork W2022134344 @default.
- W1579897411 hasRelatedWork W2591606453 @default.
- W1579897411 isParatext "false" @default.
- W1579897411 isRetracted "false" @default.
- W1579897411 magId "1579897411" @default.
- W1579897411 workType "article" @default.