Matches in SemOpenAlex for { <https://semopenalex.org/work/W1580474714> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1580474714 abstract "Impacts of 3-D integration processes on device reliabilities in thinned DRAM chip were evaluated. The retention characteristics of memory cells were degraded depending on the decreased chip thickness, especially dramatically degraded below 40-μm thickness in the case with under-fill, meanwhile, the retention characteristics were relatively not so degraded until to 30-μm thickness, but suddenly degraded below 20-μm thickness in the case without under-fill. The retention characteristics of DRAM cell in the thinned DRAM chip which was CMP-treated dramatically degraded after intentional Cu diffusion from the backside surface at 300oC annealing. Meanwhile, the retention characteristics in the thinned DRAM chip which was DP-treated did not degrade regardless of the well structure. The retention characteristics of some memory cell arrays with Cu TSV arrays began to degrade after annealing at 300oC for 30min. As the annealing temperature increase higher than 400oC, Cu atoms more spread out into larger area in the DRAM chip via poor barrier layers." @default.
- W1580474714 created "2016-06-24" @default.
- W1580474714 creator A5004925106 @default.
- W1580474714 creator A5006295728 @default.
- W1580474714 creator A5006321524 @default.
- W1580474714 creator A5014073992 @default.
- W1580474714 creator A5059487693 @default.
- W1580474714 creator A5073193050 @default.
- W1580474714 date "2015-04-01" @default.
- W1580474714 modified "2023-09-26" @default.
- W1580474714 title "Impacts of 3-D integration processes on device reliabilities in thinned DRAM chip for 3-D DRAM" @default.
- W1580474714 cites W1970164715 @default.
- W1580474714 cites W1999095731 @default.
- W1580474714 cites W2009195513 @default.
- W1580474714 cites W2009824414 @default.
- W1580474714 cites W2011694493 @default.
- W1580474714 cites W2015217276 @default.
- W1580474714 cites W2036404459 @default.
- W1580474714 cites W2056399224 @default.
- W1580474714 cites W2057450859 @default.
- W1580474714 cites W2061191508 @default.
- W1580474714 cites W2064676658 @default.
- W1580474714 cites W2080451420 @default.
- W1580474714 cites W2096042906 @default.
- W1580474714 cites W2096991703 @default.
- W1580474714 cites W2105978452 @default.
- W1580474714 cites W2127622913 @default.
- W1580474714 cites W2130095812 @default.
- W1580474714 cites W2144149750 @default.
- W1580474714 cites W2151613126 @default.
- W1580474714 cites W2532338040 @default.
- W1580474714 cites W2035113186 @default.
- W1580474714 doi "https://doi.org/10.1109/irps.2015.7112733" @default.
- W1580474714 hasPublicationYear "2015" @default.
- W1580474714 type Work @default.
- W1580474714 sameAs 1580474714 @default.
- W1580474714 citedByCount "1" @default.
- W1580474714 countsByYear W15804747142016 @default.
- W1580474714 crossrefType "proceedings-article" @default.
- W1580474714 hasAuthorship W1580474714A5004925106 @default.
- W1580474714 hasAuthorship W1580474714A5006295728 @default.
- W1580474714 hasAuthorship W1580474714A5006321524 @default.
- W1580474714 hasAuthorship W1580474714A5014073992 @default.
- W1580474714 hasAuthorship W1580474714A5059487693 @default.
- W1580474714 hasAuthorship W1580474714A5073193050 @default.
- W1580474714 hasConcept C118702147 @default.
- W1580474714 hasConcept C119599485 @default.
- W1580474714 hasConcept C127413603 @default.
- W1580474714 hasConcept C159985019 @default.
- W1580474714 hasConcept C165005293 @default.
- W1580474714 hasConcept C192562407 @default.
- W1580474714 hasConcept C2777855556 @default.
- W1580474714 hasConcept C2780866740 @default.
- W1580474714 hasConcept C41008148 @default.
- W1580474714 hasConcept C49040817 @default.
- W1580474714 hasConcept C7366592 @default.
- W1580474714 hasConcept C9390403 @default.
- W1580474714 hasConcept C98986596 @default.
- W1580474714 hasConceptScore W1580474714C118702147 @default.
- W1580474714 hasConceptScore W1580474714C119599485 @default.
- W1580474714 hasConceptScore W1580474714C127413603 @default.
- W1580474714 hasConceptScore W1580474714C159985019 @default.
- W1580474714 hasConceptScore W1580474714C165005293 @default.
- W1580474714 hasConceptScore W1580474714C192562407 @default.
- W1580474714 hasConceptScore W1580474714C2777855556 @default.
- W1580474714 hasConceptScore W1580474714C2780866740 @default.
- W1580474714 hasConceptScore W1580474714C41008148 @default.
- W1580474714 hasConceptScore W1580474714C49040817 @default.
- W1580474714 hasConceptScore W1580474714C7366592 @default.
- W1580474714 hasConceptScore W1580474714C9390403 @default.
- W1580474714 hasConceptScore W1580474714C98986596 @default.
- W1580474714 hasLocation W15804747141 @default.
- W1580474714 hasOpenAccess W1580474714 @default.
- W1580474714 hasPrimaryLocation W15804747141 @default.
- W1580474714 hasRelatedWork W1484879079 @default.
- W1580474714 hasRelatedWork W1555870291 @default.
- W1580474714 hasRelatedWork W1922881358 @default.
- W1580474714 hasRelatedWork W1969486543 @default.
- W1580474714 hasRelatedWork W2015217276 @default.
- W1580474714 hasRelatedWork W2018942386 @default.
- W1580474714 hasRelatedWork W2056036703 @default.
- W1580474714 hasRelatedWork W2092207361 @default.
- W1580474714 hasRelatedWork W2112125883 @default.
- W1580474714 hasRelatedWork W2128524515 @default.
- W1580474714 hasRelatedWork W2129452694 @default.
- W1580474714 hasRelatedWork W2143455063 @default.
- W1580474714 hasRelatedWork W2162427107 @default.
- W1580474714 hasRelatedWork W2169669807 @default.
- W1580474714 hasRelatedWork W2290767660 @default.
- W1580474714 hasRelatedWork W2319854626 @default.
- W1580474714 hasRelatedWork W2472624948 @default.
- W1580474714 hasRelatedWork W2526153448 @default.
- W1580474714 hasRelatedWork W2734399998 @default.
- W1580474714 hasRelatedWork W3190046505 @default.
- W1580474714 isParatext "false" @default.
- W1580474714 isRetracted "false" @default.
- W1580474714 magId "1580474714" @default.
- W1580474714 workType "article" @default.