Matches in SemOpenAlex for { <https://semopenalex.org/work/W1581820003> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1581820003 abstract "The paper describes the fabrication process of a shrouded turbine and surface modification using fluorinated silane coupling agents to stabilize the charges of a silicon-dioxide electret. The shrouded turbine was fabricated by cavity-through etching, which is deep reactive ion etching (DRIE) through a wafer having cavities made by DRIE and fusion bonding. By using this process, a shrouded turbine with little eccentricity was obtained without damaging the inner structures such as blades and flow ways. Charge stability of electrets was deteriorated by miniaturizing the size. The charge deterioration was caused by leakage current through the surface. To decrease the surface conduction, the surface was terminated by fluorine with silane coupling agents. As a result, the charge stability of a silicon-dioxide electret was improved 100 times compared with HMDS (hexamethyldisilazane) treatment." @default.
- W1581820003 created "2016-06-24" @default.
- W1581820003 creator A5024253162 @default.
- W1581820003 creator A5055348625 @default.
- W1581820003 creator A5086818368 @default.
- W1581820003 date "2005-08-24" @default.
- W1581820003 modified "2023-09-27" @default.
- W1581820003 title "High power electrostatic motor with micropatterned electret on shrouded turbine" @default.
- W1581820003 cites W1480276095 @default.
- W1581820003 cites W173984113 @default.
- W1581820003 cites W1843961484 @default.
- W1581820003 cites W2142202139 @default.
- W1581820003 cites W2161788391 @default.
- W1581820003 doi "https://doi.org/10.1109/sensor.2005.1496515" @default.
- W1581820003 hasPublicationYear "2005" @default.
- W1581820003 type Work @default.
- W1581820003 sameAs 1581820003 @default.
- W1581820003 citedByCount "6" @default.
- W1581820003 countsByYear W15818200032012 @default.
- W1581820003 countsByYear W15818200032013 @default.
- W1581820003 crossrefType "proceedings-article" @default.
- W1581820003 hasAuthorship W1581820003A5024253162 @default.
- W1581820003 hasAuthorship W1581820003A5055348625 @default.
- W1581820003 hasAuthorship W1581820003A5086818368 @default.
- W1581820003 hasConcept C100460472 @default.
- W1581820003 hasConcept C124634506 @default.
- W1581820003 hasConcept C127413603 @default.
- W1581820003 hasConcept C130472188 @default.
- W1581820003 hasConcept C136525101 @default.
- W1581820003 hasConcept C142724271 @default.
- W1581820003 hasConcept C159985019 @default.
- W1581820003 hasConcept C160671074 @default.
- W1581820003 hasConcept C192562407 @default.
- W1581820003 hasConcept C204787440 @default.
- W1581820003 hasConcept C2778449969 @default.
- W1581820003 hasConcept C2779227376 @default.
- W1581820003 hasConcept C34455102 @default.
- W1581820003 hasConcept C49040817 @default.
- W1581820003 hasConcept C544956773 @default.
- W1581820003 hasConcept C71924100 @default.
- W1581820003 hasConcept C78519656 @default.
- W1581820003 hasConceptScore W1581820003C100460472 @default.
- W1581820003 hasConceptScore W1581820003C124634506 @default.
- W1581820003 hasConceptScore W1581820003C127413603 @default.
- W1581820003 hasConceptScore W1581820003C130472188 @default.
- W1581820003 hasConceptScore W1581820003C136525101 @default.
- W1581820003 hasConceptScore W1581820003C142724271 @default.
- W1581820003 hasConceptScore W1581820003C159985019 @default.
- W1581820003 hasConceptScore W1581820003C160671074 @default.
- W1581820003 hasConceptScore W1581820003C192562407 @default.
- W1581820003 hasConceptScore W1581820003C204787440 @default.
- W1581820003 hasConceptScore W1581820003C2778449969 @default.
- W1581820003 hasConceptScore W1581820003C2779227376 @default.
- W1581820003 hasConceptScore W1581820003C34455102 @default.
- W1581820003 hasConceptScore W1581820003C49040817 @default.
- W1581820003 hasConceptScore W1581820003C544956773 @default.
- W1581820003 hasConceptScore W1581820003C71924100 @default.
- W1581820003 hasConceptScore W1581820003C78519656 @default.
- W1581820003 hasLocation W15818200031 @default.
- W1581820003 hasOpenAccess W1581820003 @default.
- W1581820003 hasPrimaryLocation W15818200031 @default.
- W1581820003 hasRelatedWork W1963760894 @default.
- W1581820003 hasRelatedWork W1973509602 @default.
- W1581820003 hasRelatedWork W2000618511 @default.
- W1581820003 hasRelatedWork W2020984046 @default.
- W1581820003 hasRelatedWork W2023051400 @default.
- W1581820003 hasRelatedWork W2023600456 @default.
- W1581820003 hasRelatedWork W2027606218 @default.
- W1581820003 hasRelatedWork W2049287594 @default.
- W1581820003 hasRelatedWork W2068389634 @default.
- W1581820003 hasRelatedWork W2170003735 @default.
- W1581820003 hasRelatedWork W2184253842 @default.
- W1581820003 hasRelatedWork W2481470634 @default.
- W1581820003 hasRelatedWork W2787273166 @default.
- W1581820003 hasRelatedWork W2794357847 @default.
- W1581820003 hasRelatedWork W347120575 @default.
- W1581820003 hasRelatedWork W133667937 @default.
- W1581820003 hasRelatedWork W2096682151 @default.
- W1581820003 hasRelatedWork W2817392225 @default.
- W1581820003 hasRelatedWork W2930002671 @default.
- W1581820003 hasRelatedWork W2932058243 @default.
- W1581820003 isParatext "false" @default.
- W1581820003 isRetracted "false" @default.
- W1581820003 magId "1581820003" @default.
- W1581820003 workType "article" @default.