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- W1582136891 abstract "In the production of integrated circuits, solar cells, flat panel displays and elec- tronics, thin plates are often used as a base for manufacturing. Examples are silicon wafers and glass panels on which several process steps build transistors, pixels and interconnects. To improve the production throughput these features are made smaller while the substrates are made bigger. The result is that the manufacturing equipment has to perform its process with increasing precision to ensure functionality of the end product. In addition, as the substrate size increases these plates become more fragile. A possible solution for the manufacturing equipment which requires these precise positioning and alignment tasks is to use a thin gas film on which the substrate floats. This thesis discusses the possibilities using such an air film principle in a positioning system. Pressurised air is used to provide the bearing functionality while the air flow generated is also used to drive the substrate. Both this bearing and motor function are realised in a single unit, the so-called actuator. To come to a complete positioning system, the position of the plate is measured using sensors and fed back to the actuator using a controller. The main advantage of such a system is that only the substrate itself is driven. In similar positioning systems, an additional carrier is often used on which the substrate is placed. This carrier is often several times heavier than the substrate itself. As a result the forces required for accelerating increase significantly. In precision system this leads to several unwanted effects such as frame deformation, excitation of structural resonances and an increased heat load from the power dissipation. An additional advantage to eliminating the carrier is that the fragile substrate is only in contact with the air film. With a carrier a mechanical contact is introduced where friction can occur. This in turn can cause damage to the substrate or can result in particles which can contaminate the production process." @default.
- W1582136891 created "2016-06-24" @default.
- W1582136891 creator A5072005658 @default.
- W1582136891 date "2011-11-18" @default.
- W1582136891 modified "2023-09-24" @default.
- W1582136891 title "Contactless Positioning using an Active Air Film" @default.
- W1582136891 hasPublicationYear "2011" @default.
- W1582136891 type Work @default.
- W1582136891 sameAs 1582136891 @default.
- W1582136891 citedByCount "1" @default.
- W1582136891 countsByYear W15821368912012 @default.
- W1582136891 crossrefType "journal-article" @default.
- W1582136891 hasAuthorship W1582136891A5072005658 @default.
- W1582136891 hasConcept C111368507 @default.
- W1582136891 hasConcept C111919701 @default.
- W1582136891 hasConcept C119599485 @default.
- W1582136891 hasConcept C127313418 @default.
- W1582136891 hasConcept C127413603 @default.
- W1582136891 hasConcept C154945302 @default.
- W1582136891 hasConcept C157764524 @default.
- W1582136891 hasConcept C160671074 @default.
- W1582136891 hasConcept C171146098 @default.
- W1582136891 hasConcept C172707124 @default.
- W1582136891 hasConcept C199978012 @default.
- W1582136891 hasConcept C203479927 @default.
- W1582136891 hasConcept C2776585123 @default.
- W1582136891 hasConcept C2777289219 @default.
- W1582136891 hasConcept C41008148 @default.
- W1582136891 hasConcept C555944384 @default.
- W1582136891 hasConcept C6557445 @default.
- W1582136891 hasConcept C76155785 @default.
- W1582136891 hasConcept C78519656 @default.
- W1582136891 hasConcept C79324624 @default.
- W1582136891 hasConcept C86803240 @default.
- W1582136891 hasConcept C98045186 @default.
- W1582136891 hasConceptScore W1582136891C111368507 @default.
- W1582136891 hasConceptScore W1582136891C111919701 @default.
- W1582136891 hasConceptScore W1582136891C119599485 @default.
- W1582136891 hasConceptScore W1582136891C127313418 @default.
- W1582136891 hasConceptScore W1582136891C127413603 @default.
- W1582136891 hasConceptScore W1582136891C154945302 @default.
- W1582136891 hasConceptScore W1582136891C157764524 @default.
- W1582136891 hasConceptScore W1582136891C160671074 @default.
- W1582136891 hasConceptScore W1582136891C171146098 @default.
- W1582136891 hasConceptScore W1582136891C172707124 @default.
- W1582136891 hasConceptScore W1582136891C199978012 @default.
- W1582136891 hasConceptScore W1582136891C203479927 @default.
- W1582136891 hasConceptScore W1582136891C2776585123 @default.
- W1582136891 hasConceptScore W1582136891C2777289219 @default.
- W1582136891 hasConceptScore W1582136891C41008148 @default.
- W1582136891 hasConceptScore W1582136891C555944384 @default.
- W1582136891 hasConceptScore W1582136891C6557445 @default.
- W1582136891 hasConceptScore W1582136891C76155785 @default.
- W1582136891 hasConceptScore W1582136891C78519656 @default.
- W1582136891 hasConceptScore W1582136891C79324624 @default.
- W1582136891 hasConceptScore W1582136891C86803240 @default.
- W1582136891 hasConceptScore W1582136891C98045186 @default.
- W1582136891 hasLocation W15821368911 @default.
- W1582136891 hasOpenAccess W1582136891 @default.
- W1582136891 hasPrimaryLocation W15821368911 @default.
- W1582136891 hasRelatedWork W1575425643 @default.
- W1582136891 hasRelatedWork W2556152745 @default.
- W1582136891 hasRelatedWork W3160158736 @default.
- W1582136891 hasRelatedWork W65924676 @default.
- W1582136891 hasRelatedWork W1892259998 @default.
- W1582136891 hasRelatedWork W2248061822 @default.
- W1582136891 hasRelatedWork W2603942749 @default.
- W1582136891 hasRelatedWork W2740603839 @default.
- W1582136891 hasRelatedWork W2754967202 @default.
- W1582136891 hasRelatedWork W2821564655 @default.
- W1582136891 hasRelatedWork W2836107018 @default.
- W1582136891 hasRelatedWork W2855060305 @default.
- W1582136891 hasRelatedWork W2855654861 @default.
- W1582136891 hasRelatedWork W2865072334 @default.
- W1582136891 hasRelatedWork W2870799541 @default.
- W1582136891 hasRelatedWork W2922650789 @default.
- W1582136891 hasRelatedWork W2926104219 @default.
- W1582136891 hasRelatedWork W3131263949 @default.
- W1582136891 hasRelatedWork W3140051006 @default.
- W1582136891 hasRelatedWork W3152939921 @default.
- W1582136891 isParatext "false" @default.
- W1582136891 isRetracted "false" @default.
- W1582136891 magId "1582136891" @default.
- W1582136891 workType "article" @default.