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• W1582194073 abstract "Hydrogenated amorphous carbon(a-C:H) films are prepared by rf plasma CVD in a source gas system diluted with Ar of . The spectra of emissive and reactive species in the plasma are detected using in stiu optical emission spectroscopy. Inaddition, the relationship between the film properties which can be varied by the deposition parameters and the Raman spectra is studied. In the gas system, the emission intensities of CH and decrease and those of , , and Ar increase with increasing concentration, The formation of and CH in the gas system is greatly suppressed by hydrogen addition and the excess of hydrogen addition is found to form graphite structure. The formation in the gas phase enhances a-C:H film formation." @default.
• W1582194073 created "2016-06-24" @default.
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• W1582194073 date "1996-12-01" @default.
• W1582194073 modified "2023-09-23" @default.
• W1582194073 title "OPTICAL EMISSION SPECTROSCOPY OF Ch₄/Ar/H₂ GAS DISCHARGES IN RF PLASMA CVD OF HYDROGENATED AMORPHOUS CARBON FILMS" @default.
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