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- W1582882214 abstract "An important application of piezoelectric materials is for tactile sensing. For non-planar applications, polymer materials offer the potential to provide flexible tactile sensors conforming to a variety of surface geometries. We have demonstrated a fabrication process for fabricating MEMS tactile sensor structures using a novel high-temperature piezoelectric polyimide as the sensing material. The process consists of conventional lithography and metallization processes and uses a sacrificial layer of photoresist. Electrodes are fabricated on the upper and lower surfaces of the suspended bridge and cantilever structures and a self-test electrode is fabricated underlying each suspended component for testing. Prototype structures have been fabricated on silicon substrates for the purposes of process demonstration and characterization." @default.
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- W1582882214 date "2004-03-23" @default.
- W1582882214 modified "2023-09-24" @default.
- W1582882214 title "Piezoelectric polyimide tactile sensors" @default.
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- W1582882214 doi "https://doi.org/10.1109/ugim.2003.1225750" @default.
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