FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1584202009> ?p ?o ?g. }

• W1584202009 endingPage "215" @default.
• W1584202009 startingPage "211" @default.
• W1584202009 abstract "In this study, we demonstrate low damage etching of titania for depth profile analysis using large Ar cluster ions. Sample damage caused by impinging ion beams is discussed and a comparison is made between monatomic Ar+ ions and Arn+ cluster ions with respect to surface damage. Monatomic ions of beam energy 5 kV cause considerable changes to the structure of amorphous titania resulting in the preferential removal of oxygen and damage to the lattice structure. Titanium is reduced from the +4 oxidation state to +3 and +2 oxidation state during this preferential removal. In contrast, the use of clusters greatly diminishes this damage and also reduces the incorporation of the impinging ion into the sample surface. Here we discuss the use of Arn+ clusters as a new methodology for reducing the damaging effects caused by ion bombardment." @default.
• W1584202009 created "2016-06-24" @default.
• W1584202009 creator A5026958069 @default.
• W1584202009 creator A5039962129 @default.
• W1584202009 creator A5071570179 @default.
• W1584202009 creator A5076169995 @default.
• W1584202009 creator A5085930051 @default.
• W1584202009 date "2014-01-01" @default.
• W1584202009 modified "2023-09-25" @default.
• W1584202009 title "Reduced Preferential Sputtering of TiO₂ using Massive Argon Clusters" @default.
• W1584202009 cites W1924138223 @default.
• W1584202009 cites W2063892374 @default.
• W1584202009 cites W2088403253 @default.
• W1584202009 cites W2107477775 @default.
• W1584202009 cites W2110400631 @default.
• W1584202009 cites W2161670281 @default.
• W1584202009 cites W2312484077 @default.
• W1584202009 doi "https://doi.org/10.1384/jsa.20.211" @default.
• W1584202009 hasPublicationYear "2014" @default.
• W1584202009 type Work @default.
• W1584202009 sameAs 1584202009 @default.
• W1584202009 citedByCount "27" @default.
• W1584202009 countsByYear W15842020092015 @default.
• W1584202009 countsByYear W15842020092016 @default.
• W1584202009 countsByYear W15842020092017 @default.
• W1584202009 countsByYear W15842020092018 @default.
• W1584202009 countsByYear W15842020092019 @default.
• W1584202009 countsByYear W15842020092020 @default.
• W1584202009 countsByYear W15842020092021 @default.
• W1584202009 countsByYear W15842020092022 @default.
• W1584202009 countsByYear W15842020092023 @default.
• W1584202009 crossrefType "journal-article" @default.
• W1584202009 hasAuthorship W1584202009A5026958069 @default.
• W1584202009 hasAuthorship W1584202009A5039962129 @default.
• W1584202009 hasAuthorship W1584202009A5071570179 @default.
• W1584202009 hasAuthorship W1584202009A5076169995 @default.
• W1584202009 hasAuthorship W1584202009A5085930051 @default.
• W1584202009 hasBestOaLocation W15842020091 @default.
• W1584202009 hasConcept C113196181 @default.
• W1584202009 hasConcept C121332964 @default.
• W1584202009 hasConcept C145148216 @default.
• W1584202009 hasConcept C152149077 @default.
• W1584202009 hasConcept C164866538 @default.
• W1584202009 hasConcept C171250308 @default.
• W1584202009 hasConcept C178790620 @default.
• W1584202009 hasConcept C184779094 @default.
• W1584202009 hasConcept C185592680 @default.
• W1584202009 hasConcept C19067145 @default.
• W1584202009 hasConcept C191897082 @default.
• W1584202009 hasConcept C192562407 @default.
• W1584202009 hasConcept C199360897 @default.
• W1584202009 hasConcept C22423302 @default.
• W1584202009 hasConcept C41008148 @default.
• W1584202009 hasConcept C43617362 @default.
• W1584202009 hasConcept C506065880 @default.
• W1584202009 hasConcept C50774322 @default.
• W1584202009 hasConcept C540031477 @default.
• W1584202009 hasConcept C547737533 @default.
• W1584202009 hasConcept C56052488 @default.
• W1584202009 hasConcept C8010536 @default.
• W1584202009 hasConceptScore W1584202009C113196181 @default.
• W1584202009 hasConceptScore W1584202009C121332964 @default.
• W1584202009 hasConceptScore W1584202009C145148216 @default.
• W1584202009 hasConceptScore W1584202009C152149077 @default.
• W1584202009 hasConceptScore W1584202009C164866538 @default.
• W1584202009 hasConceptScore W1584202009C171250308 @default.
• W1584202009 hasConceptScore W1584202009C178790620 @default.
• W1584202009 hasConceptScore W1584202009C184779094 @default.
• W1584202009 hasConceptScore W1584202009C185592680 @default.
• W1584202009 hasConceptScore W1584202009C19067145 @default.
• W1584202009 hasConceptScore W1584202009C191897082 @default.
• W1584202009 hasConceptScore W1584202009C192562407 @default.
• W1584202009 hasConceptScore W1584202009C199360897 @default.
• W1584202009 hasConceptScore W1584202009C22423302 @default.
• W1584202009 hasConceptScore W1584202009C41008148 @default.
• W1584202009 hasConceptScore W1584202009C43617362 @default.
• W1584202009 hasConceptScore W1584202009C506065880 @default.
• W1584202009 hasConceptScore W1584202009C50774322 @default.
• W1584202009 hasConceptScore W1584202009C540031477 @default.
• W1584202009 hasConceptScore W1584202009C547737533 @default.
• W1584202009 hasConceptScore W1584202009C56052488 @default.
• W1584202009 hasConceptScore W1584202009C8010536 @default.
• W1584202009 hasIssue "3" @default.
• W1584202009 hasLocation W15842020091 @default.
• W1584202009 hasOpenAccess W1584202009 @default.
• W1584202009 hasPrimaryLocation W15842020091 @default.
• W1584202009 hasRelatedWork W2005439218 @default.
• W1584202009 hasRelatedWork W2038363336 @default.
• W1584202009 hasRelatedWork W2041577148 @default.
• W1584202009 hasRelatedWork W2055070359 @default.
• W1584202009 hasRelatedWork W2065018915 @default.
• W1584202009 hasRelatedWork W2065743174 @default.
• W1584202009 hasRelatedWork W2091785234 @default.
• W1584202009 hasRelatedWork W2332768081 @default.
• W1584202009 hasRelatedWork W3012197531 @default.
• W1584202009 hasRelatedWork W4200161497 @default.
• W1584202009 hasVolume "20" @default.
• W1584202009 isParatext "false" @default.

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