Matches in SemOpenAlex for { <https://semopenalex.org/work/W1584493366> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1584493366 endingPage "321" @default.
- W1584493366 startingPage "312" @default.
- W1584493366 abstract "Thin functional barrier layers of aluminum oxide (Al 2 O 3 ) that are used particularly in photovoltaic (PV) modules to prevent the possibility of water vapor ingress should be applied over the entire PV surface without any defects. However, for barrier layer thicknesses within the sub-micrometer range (up to 50 nm) produced through the atomic layer deposition (ALD) method, it is common for defects to occur during the production process. To avoid defective barriers from being incorporated in the final PV unit, defects need to be detected during the barrier production process. In this paper, the implementation of in process inspection system capable of detecting surface defects such as pinholes, scratches, or particles down to a lateral size of 3 µm and a vertical resolution of 10 nm over a 500 mm barrier width is presented. The system has a built-in environmental vibration compensation capability, and can monitor ALD-coated films manufactured using roll-to-roll (R2R) techniques. Ultimately, with the aid of this in process measurement system, it should be possible to monitor the coating surface process of large-area substrates, and if necessary, carry out remedial work on the process parameters." @default.
- W1584493366 created "2016-06-24" @default.
- W1584493366 creator A5016818731 @default.
- W1584493366 creator A5031846848 @default.
- W1584493366 creator A5052856862 @default.
- W1584493366 creator A5088725599 @default.
- W1584493366 creator A5091656984 @default.
- W1584493366 date "2015-05-05" @default.
- W1584493366 modified "2023-10-16" @default.
- W1584493366 title "Implementation of in Process Surface Metrology for R2R Flexible PV Barrier Films" @default.
- W1584493366 cites W1529532293 @default.
- W1584493366 cites W1977056022 @default.
- W1584493366 cites W2003692676 @default.
- W1584493366 cites W2007323103 @default.
- W1584493366 cites W2020594946 @default.
- W1584493366 cites W2032952693 @default.
- W1584493366 cites W2073791355 @default.
- W1584493366 cites W2087653187 @default.
- W1584493366 cites W2103527264 @default.
- W1584493366 cites W2158932701 @default.
- W1584493366 doi "https://doi.org/10.20965/ijat.2015.p0312" @default.
- W1584493366 hasPublicationYear "2015" @default.
- W1584493366 type Work @default.
- W1584493366 sameAs 1584493366 @default.
- W1584493366 citedByCount "14" @default.
- W1584493366 countsByYear W15844933662016 @default.
- W1584493366 countsByYear W15844933662017 @default.
- W1584493366 countsByYear W15844933662018 @default.
- W1584493366 countsByYear W15844933662019 @default.
- W1584493366 countsByYear W15844933662020 @default.
- W1584493366 countsByYear W15844933662021 @default.
- W1584493366 countsByYear W15844933662022 @default.
- W1584493366 crossrefType "journal-article" @default.
- W1584493366 hasAuthorship W1584493366A5016818731 @default.
- W1584493366 hasAuthorship W1584493366A5031846848 @default.
- W1584493366 hasAuthorship W1584493366A5052856862 @default.
- W1584493366 hasAuthorship W1584493366A5088725599 @default.
- W1584493366 hasAuthorship W1584493366A5091656984 @default.
- W1584493366 hasBestOaLocation W15844933661 @default.
- W1584493366 hasConcept C111919701 @default.
- W1584493366 hasConcept C119599485 @default.
- W1584493366 hasConcept C120665830 @default.
- W1584493366 hasConcept C121332964 @default.
- W1584493366 hasConcept C127413603 @default.
- W1584493366 hasConcept C130230600 @default.
- W1584493366 hasConcept C171250308 @default.
- W1584493366 hasConcept C171635847 @default.
- W1584493366 hasConcept C192562407 @default.
- W1584493366 hasConcept C195766429 @default.
- W1584493366 hasConcept C2779227376 @default.
- W1584493366 hasConcept C2781448156 @default.
- W1584493366 hasConcept C41008148 @default.
- W1584493366 hasConcept C41291067 @default.
- W1584493366 hasConcept C49040817 @default.
- W1584493366 hasConcept C69544855 @default.
- W1584493366 hasConcept C78519656 @default.
- W1584493366 hasConcept C98045186 @default.
- W1584493366 hasConceptScore W1584493366C111919701 @default.
- W1584493366 hasConceptScore W1584493366C119599485 @default.
- W1584493366 hasConceptScore W1584493366C120665830 @default.
- W1584493366 hasConceptScore W1584493366C121332964 @default.
- W1584493366 hasConceptScore W1584493366C127413603 @default.
- W1584493366 hasConceptScore W1584493366C130230600 @default.
- W1584493366 hasConceptScore W1584493366C171250308 @default.
- W1584493366 hasConceptScore W1584493366C171635847 @default.
- W1584493366 hasConceptScore W1584493366C192562407 @default.
- W1584493366 hasConceptScore W1584493366C195766429 @default.
- W1584493366 hasConceptScore W1584493366C2779227376 @default.
- W1584493366 hasConceptScore W1584493366C2781448156 @default.
- W1584493366 hasConceptScore W1584493366C41008148 @default.
- W1584493366 hasConceptScore W1584493366C41291067 @default.
- W1584493366 hasConceptScore W1584493366C49040817 @default.
- W1584493366 hasConceptScore W1584493366C69544855 @default.
- W1584493366 hasConceptScore W1584493366C78519656 @default.
- W1584493366 hasConceptScore W1584493366C98045186 @default.
- W1584493366 hasIssue "3" @default.
- W1584493366 hasLocation W15844933661 @default.
- W1584493366 hasLocation W15844933662 @default.
- W1584493366 hasOpenAccess W1584493366 @default.
- W1584493366 hasPrimaryLocation W15844933661 @default.
- W1584493366 hasRelatedWork W1857408817 @default.
- W1584493366 hasRelatedWork W1974499401 @default.
- W1584493366 hasRelatedWork W2001792619 @default.
- W1584493366 hasRelatedWork W2002367777 @default.
- W1584493366 hasRelatedWork W2044858705 @default.
- W1584493366 hasRelatedWork W3113441384 @default.
- W1584493366 hasRelatedWork W3134761444 @default.
- W1584493366 hasRelatedWork W3202474131 @default.
- W1584493366 hasRelatedWork W4205716096 @default.
- W1584493366 hasRelatedWork W4323322376 @default.
- W1584493366 hasVolume "9" @default.
- W1584493366 isParatext "false" @default.
- W1584493366 isRetracted "false" @default.
- W1584493366 magId "1584493366" @default.
- W1584493366 workType "article" @default.