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- W158486539 abstract "Recovery of stiction-failed micro-cantilevers by using electrical heating has been proposed and confirmed for silicon oxide cantilevers. Micro-cantilevers with various lengths have been fabricated by surface micromachining process. Recovery of stiction-failed micro-cantilevers with heating elements is possible on cantilevers made of silicon oxide. By using a thermal model that considers the sum of elastic force and thermoelastic force as restoring force, the freestanding yield after heating is calculated. The theoretical results exhibit qualitative agreement with the experimental data of both silicon oxide and silicon cantilevers. The results suggest validity of the present model, and the feasibility of the proposed device." @default.
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- W158486539 date "2004-01-01" @default.
- W158486539 modified "2023-10-11" @default.
- W158486539 title "Stiction Recovery of Silicon Oxide Cantilevers with Heating Elements for MEMS" @default.
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- W158486539 doi "https://doi.org/10.1541/ieejsmas.124.75" @default.
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