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- W1586029251 abstract "ZnO thin films were deposited on Si (100) substrates using Pulsed Laser Deposition at 600 /spl deg/C and an oxygen pressure of 1 e-4 Torr. Inorder to improve the ZnO film quality for SAW device applications, buffer layers of ZnO and ZnO/Indium Tin Oxide(ITO) alternating layers were grown on Si (100). High-resolution X-ray photoelectron spectroscopy (XPS) indicated a binding energy of Zn(2p/sup 3/) at 1021.4 eV and O (1s) at 530.5 eV and ascertained the film composition. The quality of crystalline growth was determined using X-ray diffraction (XRD) and photoluminescence measurements. SAW filters having inter-digitated (IDT) finger widths of 1/spl mu/m and finger spacing of 2.5 /spl mu/m, were fabricated on films with different buffer layers. The input and output IDTs were composed of a 500 /spl mu/m thick layer of Al, which was deposited using e-beam evaporation. Scanning electron microscopy (SEM) images of the SAW devices indicated the high quality photolithography. The center frequency of the SAW filters has been designed to be in the GHz range by improving ZnO film quality on Si (100) substrate, and the geometry and lithography of the device. The devices are capable of ultra high frequency response suitable for secure mobile communication systems and high performance sensors." @default.
- W1586029251 created "2016-06-24" @default.
- W1586029251 creator A5027220598 @default.
- W1586029251 creator A5053952937 @default.
- W1586029251 creator A5079307265 @default.
- W1586029251 creator A5087067126 @default.
- W1586029251 date "2004-07-08" @default.
- W1586029251 modified "2023-09-26" @default.
- W1586029251 title "Study of ZNO thin films grown by PLD on [100] Si for surface acoustic wave devices" @default.
- W1586029251 doi "https://doi.org/10.1109/isdrs.2003.1272021" @default.
- W1586029251 hasPublicationYear "2004" @default.
- W1586029251 type Work @default.
- W1586029251 sameAs 1586029251 @default.
- W1586029251 citedByCount "0" @default.
- W1586029251 crossrefType "proceedings-article" @default.
- W1586029251 hasAuthorship W1586029251A5027220598 @default.
- W1586029251 hasAuthorship W1586029251A5053952937 @default.
- W1586029251 hasAuthorship W1586029251A5079307265 @default.
- W1586029251 hasAuthorship W1586029251A5087067126 @default.
- W1586029251 hasConcept C111368507 @default.
- W1586029251 hasConcept C113196181 @default.
- W1586029251 hasConcept C120665830 @default.
- W1586029251 hasConcept C121332964 @default.
- W1586029251 hasConcept C127313418 @default.
- W1586029251 hasConcept C159985019 @default.
- W1586029251 hasConcept C162954803 @default.
- W1586029251 hasConcept C171250308 @default.
- W1586029251 hasConcept C175708663 @default.
- W1586029251 hasConcept C185592680 @default.
- W1586029251 hasConcept C19067145 @default.
- W1586029251 hasConcept C192562407 @default.
- W1586029251 hasConcept C26771246 @default.
- W1586029251 hasConcept C2777289219 @default.
- W1586029251 hasConcept C32737372 @default.
- W1586029251 hasConcept C43617362 @default.
- W1586029251 hasConcept C46141821 @default.
- W1586029251 hasConcept C49040817 @default.
- W1586029251 hasConcept C543292547 @default.
- W1586029251 hasConcept C85080765 @default.
- W1586029251 hasConceptScore W1586029251C111368507 @default.
- W1586029251 hasConceptScore W1586029251C113196181 @default.
- W1586029251 hasConceptScore W1586029251C120665830 @default.
- W1586029251 hasConceptScore W1586029251C121332964 @default.
- W1586029251 hasConceptScore W1586029251C127313418 @default.
- W1586029251 hasConceptScore W1586029251C159985019 @default.
- W1586029251 hasConceptScore W1586029251C162954803 @default.
- W1586029251 hasConceptScore W1586029251C171250308 @default.
- W1586029251 hasConceptScore W1586029251C175708663 @default.
- W1586029251 hasConceptScore W1586029251C185592680 @default.
- W1586029251 hasConceptScore W1586029251C19067145 @default.
- W1586029251 hasConceptScore W1586029251C192562407 @default.
- W1586029251 hasConceptScore W1586029251C26771246 @default.
- W1586029251 hasConceptScore W1586029251C2777289219 @default.
- W1586029251 hasConceptScore W1586029251C32737372 @default.
- W1586029251 hasConceptScore W1586029251C43617362 @default.
- W1586029251 hasConceptScore W1586029251C46141821 @default.
- W1586029251 hasConceptScore W1586029251C49040817 @default.
- W1586029251 hasConceptScore W1586029251C543292547 @default.
- W1586029251 hasConceptScore W1586029251C85080765 @default.
- W1586029251 hasLocation W15860292511 @default.
- W1586029251 hasOpenAccess W1586029251 @default.
- W1586029251 hasPrimaryLocation W15860292511 @default.
- W1586029251 hasRelatedWork W1546437250 @default.
- W1586029251 hasRelatedWork W1904586045 @default.
- W1586029251 hasRelatedWork W2010618005 @default.
- W1586029251 hasRelatedWork W2028794251 @default.
- W1586029251 hasRelatedWork W2047337934 @default.
- W1586029251 hasRelatedWork W2049847970 @default.
- W1586029251 hasRelatedWork W2054555563 @default.
- W1586029251 hasRelatedWork W2065725113 @default.
- W1586029251 hasRelatedWork W2074064929 @default.
- W1586029251 hasRelatedWork W2080947344 @default.
- W1586029251 hasRelatedWork W2081309620 @default.
- W1586029251 hasRelatedWork W2083223400 @default.
- W1586029251 hasRelatedWork W2100820183 @default.
- W1586029251 hasRelatedWork W2114704014 @default.
- W1586029251 hasRelatedWork W2123309006 @default.
- W1586029251 hasRelatedWork W2123365555 @default.
- W1586029251 hasRelatedWork W2163933018 @default.
- W1586029251 hasRelatedWork W2170418328 @default.
- W1586029251 hasRelatedWork W2546636779 @default.
- W1586029251 hasRelatedWork W2117795360 @default.
- W1586029251 isParatext "false" @default.
- W1586029251 isRetracted "false" @default.
- W1586029251 magId "1586029251" @default.
- W1586029251 workType "article" @default.