FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1586087139> ?p ?o ?g. }

• W1586087139 abstract "Abstract If β-Si3 N4 and β-C3 N4 have the same structure they might be expected to be mutually miscible, giving rise to silicon carbon nitride (SiCN), which has potential industrial applications. SiCN films were deposited onto Si (100) substrates by unbalanced magnetron sputtering. Reactive deposition was performed using graphite and silicon targets in an argon–nitrogen plasma. The growth kinetics of the films are discussed. The films were characterised by X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and scanning electron microscopy. The N2 fraction in the gas mixture has a major influence on the deposition rate and composition of the films: a high N2 fraction results in increased deposition rate and N/(C + Si) and C/(N + Si) ratios. The SiCN films are mainly amorphous. XPS and FTIR spectra show the existence of Si–N, C–N single, C=N double, and C≡N triple bonds. Almost no Si–C bonding is found in the films." @default.
• W1586087139 created "2016-06-24" @default.
• W1586087139 creator A5027333194 @default.
• W1586087139 creator A5055957920 @default.
• W1586087139 date "2000-06-01" @default.
• W1586087139 modified "2023-09-24" @default.
• W1586087139 title "Formation of β-C3N4grains by sputtering" @default.
• W1586087139 cites W1578608441 @default.
• W1586087139 cites W1975993919 @default.
• W1586087139 cites W1989101453 @default.
• W1586087139 cites W2027548111 @default.
• W1586087139 cites W2033512877 @default.
• W1586087139 cites W2038015091 @default.
• W1586087139 cites W2053739081 @default.
• W1586087139 cites W2062402920 @default.
• W1586087139 cites W2089537238 @default.
• W1586087139 cites W2092332261 @default.
• W1586087139 cites W2094015771 @default.
• W1586087139 cites W2117636701 @default.
• W1586087139 cites W2126640661 @default.
• W1586087139 doi "https://doi.org/10.1179/026708400101517189" @default.
• W1586087139 hasPublicationYear "2000" @default.
• W1586087139 type Work @default.
• W1586087139 sameAs 1586087139 @default.
• W1586087139 citedByCount "4" @default.
• W1586087139 crossrefType "journal-article" @default.
• W1586087139 hasAuthorship W1586087139A5027333194 @default.
• W1586087139 hasAuthorship W1586087139A5055957920 @default.
• W1586087139 hasConcept C113196181 @default.
• W1586087139 hasConcept C127413603 @default.
• W1586087139 hasConcept C151730666 @default.
• W1586087139 hasConcept C159985019 @default.
• W1586087139 hasConcept C160892712 @default.
• W1586087139 hasConcept C161790260 @default.
• W1586087139 hasConcept C171250308 @default.
• W1586087139 hasConcept C175708663 @default.
• W1586087139 hasConcept C178790620 @default.
• W1586087139 hasConcept C185592680 @default.
• W1586087139 hasConcept C19067145 @default.
• W1586087139 hasConcept C191897082 @default.
• W1586087139 hasConcept C192562407 @default.
• W1586087139 hasConcept C194760766 @default.
• W1586087139 hasConcept C22423302 @default.
• W1586087139 hasConcept C26771246 @default.
• W1586087139 hasConcept C2777431650 @default.
• W1586087139 hasConcept C2777492770 @default.
• W1586087139 hasConcept C2779227376 @default.
• W1586087139 hasConcept C2779698641 @default.
• W1586087139 hasConcept C2816523 @default.
• W1586087139 hasConcept C42360764 @default.
• W1586087139 hasConcept C544956773 @default.
• W1586087139 hasConcept C547737533 @default.
• W1586087139 hasConcept C56052488 @default.
• W1586087139 hasConcept C61427134 @default.
• W1586087139 hasConcept C64297162 @default.
• W1586087139 hasConcept C65165184 @default.
• W1586087139 hasConcept C8010536 @default.
• W1586087139 hasConcept C86803240 @default.
• W1586087139 hasConceptScore W1586087139C113196181 @default.
• W1586087139 hasConceptScore W1586087139C127413603 @default.
• W1586087139 hasConceptScore W1586087139C151730666 @default.
• W1586087139 hasConceptScore W1586087139C159985019 @default.
• W1586087139 hasConceptScore W1586087139C160892712 @default.
• W1586087139 hasConceptScore W1586087139C161790260 @default.
• W1586087139 hasConceptScore W1586087139C171250308 @default.
• W1586087139 hasConceptScore W1586087139C175708663 @default.
• W1586087139 hasConceptScore W1586087139C178790620 @default.
• W1586087139 hasConceptScore W1586087139C185592680 @default.
• W1586087139 hasConceptScore W1586087139C19067145 @default.
• W1586087139 hasConceptScore W1586087139C191897082 @default.
• W1586087139 hasConceptScore W1586087139C192562407 @default.
• W1586087139 hasConceptScore W1586087139C194760766 @default.
• W1586087139 hasConceptScore W1586087139C22423302 @default.
• W1586087139 hasConceptScore W1586087139C26771246 @default.
• W1586087139 hasConceptScore W1586087139C2777431650 @default.
• W1586087139 hasConceptScore W1586087139C2777492770 @default.
• W1586087139 hasConceptScore W1586087139C2779227376 @default.
• W1586087139 hasConceptScore W1586087139C2779698641 @default.
• W1586087139 hasConceptScore W1586087139C2816523 @default.
• W1586087139 hasConceptScore W1586087139C42360764 @default.
• W1586087139 hasConceptScore W1586087139C544956773 @default.
• W1586087139 hasConceptScore W1586087139C547737533 @default.
• W1586087139 hasConceptScore W1586087139C56052488 @default.
• W1586087139 hasConceptScore W1586087139C61427134 @default.
• W1586087139 hasConceptScore W1586087139C64297162 @default.
• W1586087139 hasConceptScore W1586087139C65165184 @default.
• W1586087139 hasConceptScore W1586087139C8010536 @default.
• W1586087139 hasConceptScore W1586087139C86803240 @default.
• W1586087139 hasLocation W15860871391 @default.
• W1586087139 hasOpenAccess W1586087139 @default.
• W1586087139 hasPrimaryLocation W15860871391 @default.
• W1586087139 hasRelatedWork W1980326898 @default.
• W1586087139 hasRelatedWork W1981925042 @default.
• W1586087139 hasRelatedWork W1987194126 @default.
• W1586087139 hasRelatedWork W1995115638 @default.
• W1586087139 hasRelatedWork W2002260487 @default.
• W1586087139 hasRelatedWork W2007855138 @default.
• W1586087139 hasRelatedWork W2017829830 @default.
• W1586087139 hasRelatedWork W2022387521 @default.
• W1586087139 hasRelatedWork W2032195445 @default.

• next