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- W1586382055 abstract "In this paper, comprehensive studies on planarized Al alloy interconnect and contact plug technology using long-throw-sputtering (LTS) and two-step cold/hot Al flow technologies are presented. Experimental results demonstrate that LTS-based cold/hot Al PVD technology is capable of completely filling contact holes as small as 0.3 /spl mu/m and simultaneously planarizing the Al wiring at process temperatures as low as 420/spl deg/C. The wider process window and excellent Al(111) preferred texture suggest that this technology is an attractive alternative to conventional W/Al interconnect metallization." @default.
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- W1586382055 date "2002-11-27" @default.
- W1586382055 modified "2023-09-26" @default.
- W1586382055 title "Two-step planarized Al-Cu PVD process using long throw sputtering technology" @default.
- W1586382055 cites W2012572293 @default.
- W1586382055 doi "https://doi.org/10.1109/iitc.1998.704906" @default.
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