Matches in SemOpenAlex for { <https://semopenalex.org/work/W1590517245> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W1590517245 abstract "Voltage contrast test structures for use with KLA-Tencor's /spl mu/Loop/spl trade/ system have been developed for rapid reduction of the yield limiting defect density (D0) from the gate module. The gate module is typically one of the top three sources of random yield loss in advanced integrated circuit technologies. The /spl mu/Loop system allows in-line detection of nearly 100% of the killer defects affecting these special comb test structures, which mimic product. Because this system is based on in-line voltage contrast inspection, experiments may be completed extremely rapidly. These two advantages make this system a major improvement over past techniques for debugging the gate module. Implementation of gate-level /spl mu/Loop test structures is challenging because of the lack of a direct ground path from the polysilicon used to make the gate. This paper describes how this challenge is overcome. Application of this methodology to a recent technology at Agere Systems is described. Ten experimental lots were used over a period of three quarters to drive gate-level D0 reduction. Over this period, the gate-level D0 decreased by 62%." @default.
- W1590517245 created "2016-06-24" @default.
- W1590517245 creator A5001084136 @default.
- W1590517245 creator A5008551908 @default.
- W1590517245 creator A5010767615 @default.
- W1590517245 creator A5014642797 @default.
- W1590517245 creator A5037412404 @default.
- W1590517245 date "2003-10-01" @default.
- W1590517245 modified "2023-09-27" @default.
- W1590517245 title "Rapid reduction of gate-level electrical defectivity using voltage contrast test structures" @default.
- W1590517245 cites W3116346739 @default.
- W1590517245 cites W3114543867 @default.
- W1590517245 doi "https://doi.org/10.1109/asmc.2003.1194505" @default.
- W1590517245 hasPublicationYear "2003" @default.
- W1590517245 type Work @default.
- W1590517245 sameAs 1590517245 @default.
- W1590517245 citedByCount "1" @default.
- W1590517245 crossrefType "proceedings-article" @default.
- W1590517245 hasAuthorship W1590517245A5001084136 @default.
- W1590517245 hasAuthorship W1590517245A5008551908 @default.
- W1590517245 hasAuthorship W1590517245A5010767615 @default.
- W1590517245 hasAuthorship W1590517245A5014642797 @default.
- W1590517245 hasAuthorship W1590517245A5037412404 @default.
- W1590517245 hasConcept C111335779 @default.
- W1590517245 hasConcept C119599485 @default.
- W1590517245 hasConcept C127413603 @default.
- W1590517245 hasConcept C131017901 @default.
- W1590517245 hasConcept C165801399 @default.
- W1590517245 hasConcept C168065819 @default.
- W1590517245 hasConcept C198352243 @default.
- W1590517245 hasConcept C199360897 @default.
- W1590517245 hasConcept C21200559 @default.
- W1590517245 hasConcept C24326235 @default.
- W1590517245 hasConcept C2524010 @default.
- W1590517245 hasConcept C33923547 @default.
- W1590517245 hasConcept C41008148 @default.
- W1590517245 hasConceptScore W1590517245C111335779 @default.
- W1590517245 hasConceptScore W1590517245C119599485 @default.
- W1590517245 hasConceptScore W1590517245C127413603 @default.
- W1590517245 hasConceptScore W1590517245C131017901 @default.
- W1590517245 hasConceptScore W1590517245C165801399 @default.
- W1590517245 hasConceptScore W1590517245C168065819 @default.
- W1590517245 hasConceptScore W1590517245C198352243 @default.
- W1590517245 hasConceptScore W1590517245C199360897 @default.
- W1590517245 hasConceptScore W1590517245C21200559 @default.
- W1590517245 hasConceptScore W1590517245C24326235 @default.
- W1590517245 hasConceptScore W1590517245C2524010 @default.
- W1590517245 hasConceptScore W1590517245C33923547 @default.
- W1590517245 hasConceptScore W1590517245C41008148 @default.
- W1590517245 hasLocation W15905172451 @default.
- W1590517245 hasOpenAccess W1590517245 @default.
- W1590517245 hasPrimaryLocation W15905172451 @default.
- W1590517245 hasRelatedWork W2047481672 @default.
- W1590517245 hasRelatedWork W2066459983 @default.
- W1590517245 hasRelatedWork W2174818508 @default.
- W1590517245 hasRelatedWork W2212511180 @default.
- W1590517245 hasRelatedWork W2748952813 @default.
- W1590517245 hasRelatedWork W2798274127 @default.
- W1590517245 hasRelatedWork W2899084033 @default.
- W1590517245 hasRelatedWork W30077178 @default.
- W1590517245 hasRelatedWork W3043854404 @default.
- W1590517245 hasRelatedWork W2800441849 @default.
- W1590517245 isParatext "false" @default.
- W1590517245 isRetracted "false" @default.
- W1590517245 magId "1590517245" @default.
- W1590517245 workType "article" @default.