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• W1590534230 abstract "A 0.1 /spl mu/m gate length self-aligned GaAs channel MESFET with a maximum current gain cutoff frequency (f/sub T/) of 113 GHz has been developed. This FET has a planar structure with a selective ion implanted channel layer and self-aligned n/sup +/-layers. The 0.1 /spl mu/m gate length is attained though conventional photolithography and ECR-etching. The tri-level resist technique and two step etching process are developed to attain 0.1 /spl mu/m gate. The demonstration that planar GaAs MESFETs can achieve an f/sub T/ greater than 110 GHz is significant from the view point of LSI fabrication. >" @default.
• W1590534230 created "2016-06-24" @default.
• W1590534230 creator A5002200023 @default.
• W1590534230 creator A5070289686 @default.
• W1590534230 creator A5080962139 @default.
• W1590534230 creator A5087002387 @default.
• W1590534230 date "2002-12-30" @default.
• W1590534230 modified "2023-09-23" @default.
• W1590534230 title "0.1-μm GaAs MESFET's fabricated using ion-implantation and photolithography" @default.
• W1590534230 cites W2021044399 @default.
• W1590534230 cites W2044779621 @default.
• W1590534230 cites W2077951560 @default.
• W1590534230 cites W2132862069 @default.
• W1590534230 cites W2164528160 @default.
• W1590534230 cites W2171946433 @default.
• W1590534230 cites W1997195293 @default.
• W1590534230 doi "https://doi.org/10.1109/gaas.1993.394473" @default.
• W1590534230 hasPublicationYear "2002" @default.
• W1590534230 type Work @default.
• W1590534230 sameAs 1590534230 @default.
• W1590534230 citedByCount "5" @default.
• W1590534230 crossrefType "proceedings-article" @default.
• W1590534230 hasAuthorship W1590534230A5002200023 @default.
• W1590534230 hasAuthorship W1590534230A5070289686 @default.
• W1590534230 hasAuthorship W1590534230A5080962139 @default.
• W1590534230 hasAuthorship W1590534230A5087002387 @default.
• W1590534230 hasConcept C100460472 @default.
• W1590534230 hasConcept C105487726 @default.
• W1590534230 hasConcept C119599485 @default.
• W1590534230 hasConcept C121684516 @default.
• W1590534230 hasConcept C127413603 @default.
• W1590534230 hasConcept C134123091 @default.
• W1590534230 hasConcept C134786449 @default.
• W1590534230 hasConcept C136525101 @default.
• W1590534230 hasConcept C142724271 @default.
• W1590534230 hasConcept C145148216 @default.
• W1590534230 hasConcept C145598152 @default.
• W1590534230 hasConcept C165801399 @default.
• W1590534230 hasConcept C171250308 @default.
• W1590534230 hasConcept C172385210 @default.
• W1590534230 hasConcept C178790620 @default.
• W1590534230 hasConcept C185592680 @default.
• W1590534230 hasConcept C192562407 @default.
• W1590534230 hasConcept C204787440 @default.
• W1590534230 hasConcept C2779227376 @default.
• W1590534230 hasConcept C41008148 @default.
• W1590534230 hasConcept C41823505 @default.
• W1590534230 hasConcept C49040817 @default.
• W1590534230 hasConcept C510052550 @default.
• W1590534230 hasConcept C53524968 @default.
• W1590534230 hasConcept C6142545 @default.
• W1590534230 hasConcept C71924100 @default.
• W1590534230 hasConceptScore W1590534230C100460472 @default.
• W1590534230 hasConceptScore W1590534230C105487726 @default.
• W1590534230 hasConceptScore W1590534230C119599485 @default.
• W1590534230 hasConceptScore W1590534230C121684516 @default.
• W1590534230 hasConceptScore W1590534230C127413603 @default.
• W1590534230 hasConceptScore W1590534230C134123091 @default.
• W1590534230 hasConceptScore W1590534230C134786449 @default.
• W1590534230 hasConceptScore W1590534230C136525101 @default.
• W1590534230 hasConceptScore W1590534230C142724271 @default.
• W1590534230 hasConceptScore W1590534230C145148216 @default.
• W1590534230 hasConceptScore W1590534230C145598152 @default.
• W1590534230 hasConceptScore W1590534230C165801399 @default.
• W1590534230 hasConceptScore W1590534230C171250308 @default.
• W1590534230 hasConceptScore W1590534230C172385210 @default.
• W1590534230 hasConceptScore W1590534230C178790620 @default.
• W1590534230 hasConceptScore W1590534230C185592680 @default.
• W1590534230 hasConceptScore W1590534230C192562407 @default.
• W1590534230 hasConceptScore W1590534230C204787440 @default.
• W1590534230 hasConceptScore W1590534230C2779227376 @default.
• W1590534230 hasConceptScore W1590534230C41008148 @default.
• W1590534230 hasConceptScore W1590534230C41823505 @default.
• W1590534230 hasConceptScore W1590534230C49040817 @default.
• W1590534230 hasConceptScore W1590534230C510052550 @default.
• W1590534230 hasConceptScore W1590534230C53524968 @default.
• W1590534230 hasConceptScore W1590534230C6142545 @default.
• W1590534230 hasConceptScore W1590534230C71924100 @default.
• W1590534230 hasLocation W15905342301 @default.
• W1590534230 hasOpenAccess W1590534230 @default.
• W1590534230 hasPrimaryLocation W15905342301 @default.
• W1590534230 hasRelatedWork W1510438679 @default.
• W1590534230 hasRelatedWork W1599292972 @default.
• W1590534230 hasRelatedWork W1978266345 @default.
• W1590534230 hasRelatedWork W1980713538 @default.
• W1590534230 hasRelatedWork W1991308296 @default.
• W1590534230 hasRelatedWork W1995250927 @default.
• W1590534230 hasRelatedWork W2005814273 @default.
• W1590534230 hasRelatedWork W2045446326 @default.
• W1590534230 hasRelatedWork W2064142808 @default.
• W1590534230 hasRelatedWork W2067376122 @default.
• W1590534230 hasRelatedWork W2100526292 @default.
• W1590534230 hasRelatedWork W2107686967 @default.
• W1590534230 hasRelatedWork W2117476447 @default.
• W1590534230 hasRelatedWork W2138041513 @default.
• W1590534230 hasRelatedWork W2146459191 @default.
• W1590534230 hasRelatedWork W2147546146 @default.
• W1590534230 hasRelatedWork W2161317540 @default.
• W1590534230 hasRelatedWork W2165614155 @default.
• W1590534230 hasRelatedWork W2542133832 @default.

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